薄膜热电堆热流传感器频率响应动态特性研究  

Dynamic characteristics research of frequency response of thin film thermopile heat flow sensor

作　　者：刘云东 王高[1] 张丛春[2] 黄漫国[3] LIU Yundong;WANG Gao;ZHANG Congchun;HUANG Manguo(School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai 200240,China;AVIC Beijing Chang Cheng Aeronautics Measurement andControl Technology Research Institute,Beijing 101111,China)

机构地区：[1]中北大学信息与通信工程学院,山西太原030051 [2]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240 [3]航空工业北京长城航空测控技术研究所,北京101111

出　　处：《传感器与微系统》2022年第11期35-38,43,共5页Transducer and Microsystem Technologies

基　　金：山西省研究生创新资助项目(2021Y579)。

摘　　要：为了快速、准确地反映航空、航天部件瞬变热流的变化,需要热流传感器具有快速动态频率响应特性。传统测试方法的热流源频率调制方式粗略,热流上限低,无法满足未来高速热流传感器的测试要求。辐射热流测试系统以高功率半导体激光器作为热流源,通过电压控制模块调制激光器输出频率,系统响应时间可达微秒(μs)级,可以产生50 MW/m^(2)的热流信号。通过Z-t变换求得传感器脉冲响应的时间常数τ,获得频率响应理论值723 Hz;通过快速傅里叶变换(FFT)求得无量纲频率响应曲线,测得频率响应约为510 Hz,完成薄膜热电堆热流传感器动态频率响应测试,并分析传感器动态性能和综合评价测试平台。In order to rapidly and accurately reflect transient heat flow changes of aerospace components, heat flow sensors is required to have fast dynamic frequency response characteristics.The heat flux source frequency modulation method of the traditional test method is rough, and the upper limit of heat flux is low, which cannot meet the test requirements of future high-speed heat flux sensors.The radiation heat flow test system uses a high-power semiconductor laser as a heat flow source, modulates the output frequency of the laser through a voltage control module, and the system response time can reach μs level, which can generate heat flow signal of 50 MW/m^(2).The time constant τ of impulse response of the sensor is obtained by Z-t transformation, and the theoretical value of frequency response is 723 Hz.The dimensionless frequency response curve is obtained by fast Fourier transform(FFT),and the measured frequency response is about 510 Hz, dynamic frequency response test of the thin film thermopile heat flow sensor is completed, dynamic performance of sensor is analyzed and test platform is comprehensively evaluated.

关 键 词：频率调制 辐射热流测试系统 薄膜热电堆热流传感器 频率响应 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH89[自动化与计算机技术—控制科学与工程] V19[机械工程—仪器科学与技术]