微通道板碘化铯膜层抗潮解超薄保护膜层  

Anti-deliquescence ultra-thin protective film of cesium iodide film on MCP

作　　者：赵胜 邱祥彪 金戈 李婧雯 张正君 孙赛林 林焱剑 胡泽训 王鹏飞 高鹏 郭燕 ZHAO Sheng;QIU Xiangbiao;JIN Ge;LI Jingwen;ZHANG Zhengjun;SUN Sailin;LIN Yanjian;HU Zexun;WANG Pengfei;GAO Peng;GUO Yan(North Night Vision Science and Technology(Nanjing)Research Institute Co.,Ltd.,Nanjing 211106,China)

机构地区：[1]北方夜视科技(南京)研究院有限公司,江苏南京211106

出　　处：《应用光学》2022年第6期1196-1201,共6页Journal of Applied Optics

基　　金：国家自然科学基金青年基金项目(12003010)。

摘　　要：碘化铯膜层对紫外光以及X射线具有很高的光电转换效率,但在空气中容易发生潮解。介绍了微通道板碘化铯膜层抗潮解超薄保护膜层的制备与保护效果。使用扫描式电子显微镜(scanning electron microscope,SEM)对碘化铯薄膜光阴极微通道板的镀膜深度和厚度进行测试,采用氧化铝作为碘化铯薄膜光阴极的保护膜层,并分别制备了厚度为2 nm、5 nm和10 nm的氧化铝保护膜层。在空气中存放不同时间后,碘化铯薄膜光阴极微通道板表面未发生明显潮解变化,其增益约为8800,暗计数率约为4.1 counts·s^(−1)·cm^(−2)。试验证明,氧化铝能够作为微通道板碘化铯膜层抗潮解超薄保护膜层。Cesium iodide film has the high photoelectric conversion efficiency for ultraviolet light and X-ray,but it is prone to deliquesce in air.The preparation and protective effect of the anti-deliquescence ultra-thin protective film of cesium iodide film on micro-channel plate(MCP)were introduced.The coating depth and thickness of cesium iodide thin film photocathode MCP were tested by scanning electron microscope(SEM).Alumina was used as the protective film of cesium iodide thin film photocathode,and the alumina protective films with thickness of 2 nm,5 nm and 10 nm was prepared respectively.After storing in the air for different times,there was no obvious deliquescence change on the surface of the cesium iodide thin film photocathode MCP.The gain is about 8800,and the dark count rate is about 4.1 counts·s^(−1)·cm^(−2).It is proved that the alumina can be used as the anti-deliquescence ultra-thin protective film of cesium iodide film on MCP.

关 键 词：微通道板 碘化铯 氧化铝保护膜 抗潮解 原子层沉积 

分 类 号：TN233[电子电信—物理电子学]