射频SAW器件非线性信号的测量及产生机制分析  

Measurement and Generation Mechanism Analysis of Nonlinear Signals in RF SAW Devices

作　　者：李百川 罗阳[1] 傅肃磊 王为标 张巧珍 LI Baichuan;LUO Yang;FU Sulei;WANG Weibiao;ZHANG Qiaozhen(The College of Information,Mechanical and Electrical Engineering,Shanghai Normal University,Shanghai 200234,China;School of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;Wuxi Shoulder Electronics Limited,Wuxi 214124,China)

机构地区：[1]上海师范大学信息与机电工程学院,上海200234 [2]清华大学材料学院,北京100084 [3]无锡市好达电子股份有限公司,江苏无锡214124

出　　处：《压电与声光》2022年第5期682-686,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金青年基金资助项目(11904233)。

摘　　要：射频前端的高度集成和高能量密度使声表面波(SAW)器件的非线性问题愈发严重。该文搭建了射频SAW器件非线性信号的测量系统,对SAW谐振器的二次谐波(H2)和三次谐波(H3)信号进行了准确测量。分析测量结果,讨论了非线性谐波信号的产生机制,并通过非线性有限元(FEM)模型仿真结果与测量结果拟合对比,验证了介电非线性和声应变的非线性效应对谐波产生的影响,为进一步研究非线性抑制方法,设计高线性度SAW器件提供了重要支撑。The high integration and high energy density of the RF front-end make the nonlinearity problem in surface acoustic wave(SAW)devices more and more serious.A measurement system of nonlinear signals in RF SAW devices has been set up in this work,and the second harmonic(H2)and third order harmonic(H3)signals of SAW resonators are measured precisely.The measured results are analyzed and the generation mechanisms of nonlinear harmonic signals are discussed.By comparing the fitted simulation result of nonlinear finite element method(FEM)model with the measured results,the influences of the dielectric nonlinearity and the nonlinear effect of acoustic strain on the harmonic generation are verified,which provides an important support for further study on the nonlinear suppression method and design of SAW devices with high linearity.

关 键 词：声表面波(SAW)器件 非线性 测量系统 谐波信号 产生机制 

分 类 号：TN65[电子电信—电路与系统] TN713