基于SOI衬底的宽带低损耗声表面波滤波器研究  

Study on Wideband Low-Loss SAW Filter Based on SOI Substrate

作　　者：苗湘 闫坤坤 黄歆 姜靖雯 黄小东 王文[2] MIAO Xiang;YAN Kunkun;HUANG Xin;JIANG Jingwen;HUANG Xiaodong;WANG Wen(Beijing ZhongKe FeiHong Science&Technology Co.,LTD.,Beijing 100095,China;Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]北京中科飞鸿科技股份有限公司,北京100095 [2]中国科学院声学研究所,北京100190

出　　处：《压电与声光》2022年第5期718-721,共4页Piezoelectrics & Acoustooptics

摘　　要：使用结构为42°Y-X LiTaO_(3)(600 nm)/SiO_(2)(500 nm)/Si的SOI衬底,通过抑制横向模式等优化设计,研制了单端谐振器和声表面波滤波器。经测试,谐振器的谐振频率为1.5 GHz,品质因数(Q)值高达4000;滤波器的中心频率为1370 MHz,插入损耗为-1.2 dB,1 dB带宽为74 MHz,相对带宽达到5.4%,阻带抑制大于40 dB,且温度系数在-55~+85℃时优于-9×10^(-6)/℃。该产品具有高频、宽带、低损耗、低温漂、高阻带抑制的特点,其性能指标优异,具有很好的实用性。The one-port resonator and SAW filter were developed by using the SOI substrate with 42°Y-X LiTaO_(3)/SiO_(2)/Si structure and optimizing design such as suppression of the transverse mode.The testing results show that the resonant frequency of resonator is 1.5 GHz,the Bode Q value is as high as 4000.The center frequency of SAW filter is 1370 MHz,and the insertion loss is-1.2 dB.The bandwidth of 1 dB is 74 MHz,and the relative bandwidth is 5.4%.The stop-band rejection is more than 40 dB,and the temperature coefficient is better than-9×10^(-6)/℃at-55~+85℃.The product has the characteristics of high frequency,wide bandwidth,low loss,low temperature drift and high stop-band rejection,and its performance specifications are excellent and has good practicability.

关 键 词：SOI衬底 大带宽 横向模式 谐振器 声表面波滤波器 

分 类 号：TN65[电子电信—电路与系统] TN713