双层泵腔压电无阀微泵结构设计与优化  

Structural Design and Optimization of Piezoelectric Valveless Micropump with Double-Layer Pump Chamber

作　　者：单杰 郭利华[1] 冉朋辉 李经民[1] SHAN Jie;GUO Lihua;RAN Penghui;LI Jingmin(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学辽宁省微纳米技术与系统重点实验室,辽宁大连116024

出　　处：《压电与声光》2022年第5期746-751,共6页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划基金资助项目(2020YFB2009002)。

摘　　要：面向植入式微泵在生物医疗领域的应用需求,为了提高低电压及微型化条件下微泵的输出流量,该文设计了一种双层泵腔压电无阀植入式微泵。基于压电振子的压电耦合仿真以及微泵的电-固-液三相耦合仿真,验证了双层泵腔微泵设计的有效性,并优化了结构及驱动参数。通过实验验证了耦合仿真结果的正确性,并测试了微泵的流量范围。结果表明,微泵最优设计参数:扩散角为30°,颈宽为300μm,上层泵腔高度为100μm。微泵的净流量随电压的增大而增大,且适用于低频驱动。实验结果表明,双层泵腔压电无阀微泵的输出流量是传统压电无阀微泵的5.38倍。Targeting the requirement of implantable micropump in the field of biomedicine,in order to increase the output flow rate of micropump under low voltage and miniaturization conditions,a piezoelectric valveless implantable micropump with double-layer pump chamber was designed in this paper.Based on the piezoelectric coupling simulation of the piezoelectric vibrator and the electric-solid-fluid three-phase coupling simulation of the proposed micropump,the validity of the design of the double-layer chamber micropump was verified,and the structural and driving parameters were optimized.The experiments were carried out to verify the feasibility of the results of the coupled simulation and the flow range of the proposed micropump was tested.The results show that the optimal design parameters of the micropump are as follows:the diffusion angle is 30°,the neck width is 300μm and the height of the upper pump chamber is 100μm.The net flow of micropump increases with the increase of voltage,and it is suitable for low-frequency drive.The experiments results show that the output flow rate of the double-layer pump chamber piezoelectric valveless micropump is 5.38 times higher than that of the conventional piezoelectric valveless micropump.

关 键 词：压电微泵 双层泵腔 电-固-液耦合 压电耦合 喷嘴扩散器 

分 类 号：TM28[一般工业技术—材料科学与工程] TN384[电气工程—电工理论与新技术]