极紫外及X射线波段超光滑反射镜的超精密加工与检测  

Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray

作　　者：余俊[1] 王占山[1] 黄秋实[1] 张众[1] 沈正祥[1] 焦宏飞[1] 盛鹏峰 夏菁菁 王一凡 YU Jun;WANG Zhanshan;HUANG Qiushi;ZHANG Zhong;SHEN Zhenxiang;JIAO Hongfei;SHENG Pengfeng;XIA Jingjing;WANG Yifan(Institute of Precision Optical Engineering,MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai Frontiers Science Center of Digital Optics,Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092

出　　处：《光学精密工程》2022年第21期2688-2697,共10页Optics and Precision Engineering

基　　金：国家重点研发计划资助项目(No.2019YFE03080200);国家自然科学基金资助项目(No.62105244)。

摘　　要：极紫外、X射线为微观物质认识、宏观空间探测提供了高精度的观测手段,但这类观测的实现需要大量高精度光学反射元件的支撑。由于极紫外、X射线在光学表面更易发生散射,其光学反射镜基底的精度需求和制作技术也明显区别于长波元件。近年来,同济大学精密光学工程技术研究所建立了极紫外、X射线反射元件基底的超精密加工与检测平台,研发了超光滑非球面的离子束修形技术,提出了基于泽尼克多项式的随机离轴旋转绝对检测方法,形成了极紫外、X射线光学用反射镜基底的高精度全流程研制技术,并将该技术成功地应用于国内和国际短波光学大科学装置中。本文综述了本课题组在极紫外、X射线用反射镜制作领域中的研究进展。High-precision extreme ultraviolet and X-ray observations for space exploration require the development of advanced micro materials for the numerous high-precision optical reflection elements used in such observations. Because short wavelengths are more prone to scattering on optical surfaces,the precision requirements and the fabrication techniques of short-wavelength optical components differ significantly from those of long-wavelength optical components. The Institute of Precision Optical Engineering(IPOE)at Tongji University has 20 years of research experience in this field. We have built a high-accuracy fabrication and measurement platform based on short-wavelength mirrors,developed an ion beam configuration of an ultra-smooth aspheric surface,proposed an absolute measurement method using random off-axis rotation based on Zernike polynomials,and formed a complete technology chain to develop aspheric reflector substrates. These optical components and systems have been successfully applied at several shortwavelength science facilities both in China and abroad. This study will briefly introduce the recent research progress on these optical aspheric reflectors at the IPOE.

关 键 词：超精密加工 极紫外 X射线 反射镜基底 非球面元件 绝对检测 

分 类 号：TH751[机械工程—仪器科学与技术]