基于人工智能的LDI对位靶标精确识别方法探讨  

Discussion on accurate identification method of LDI alignment target based on artificial intelligence

作　　者：方林 董帅 郑超 曲鲁杰 Fang Lin;Dong Shuai;Zheng Chao;Qu Lujie

机构地区：[1]合肥芯碁微电子装备股份有限公司,安徽合肥230601

出　　处：《印制电路信息》2022年第11期16-21,共6页Printed Circuit Information

摘　　要：靶标精确识别定位技术一直是激光直接成像技术(LDI)中的重要组成部分。随着人工智能技术的发展,引入人工智能相关技术来提高LDI靶标精确识别是一种解决行业痛点的有效解决方案。文章总结了目前行业内常见的靶标类型,识别难点,并从光学和人工智能算法两个方面探讨精确识别方案。Mark identification and positioning technology has always been an important part of laser direct image technology(LDI).With the development of artificial intelligence technology,the introduction of artificial intelligence-related technologies to improve the accurate identification of LDI marks is an effective solution to solve the pain points of the industry.This paper summarizes the common types of marks in the industry,the difficulties in identification,and discusses the precise identification scheme from the aspects of optics and artificial intelligence algorithms.

关 键 词：激光直接成像 人工智能 精确识别 光学元件 

分 类 号：TN41[电子电信—微电子学与固体电子学]