石墨基底上制备TaC纳米颗粒的研究  

Study on the preparation of TaC nanoparticles on graphite substrate

作　　者：陈成克 姜从强 蒋梅燕 李晓 鲁少华 胡晓君 CHEN Chengke;JIANG Congqiang;JIANG Meiyan;LI Xiao;LU Shaohua;HU Xiaojun(College of Materials Science and Engineering,Zhejiang University of Technology,Hangzhou 310014,China)

机构地区：[1]浙江工业大学材料科学与工程学院,浙江杭州310014

出　　处：《浙江工业大学学报》2022年第6期671-678,共8页Journal of Zhejiang University of Technology

基　　金：国家自然科学基金联合重点项目(U1809210);国家重点研发计划中欧国际合作项目(2016YFE0133200);浙江省重点研发计划国际科技合作“一带一路”专项(2018C04021)。

摘　　要：利用热丝化学气相沉积(HFCVD)设备中的钽丝为加热源和钽源,在石墨基底上直接制备TaC纳米颗粒,并研究不同热丝功率对TaC颗粒尺寸及其致密度的影响。实验结果表明:当热丝功率为1 600 W时,TaC颗粒致密度低,颗粒尺寸较小,约为14 nm;随着功率逐渐增大,TaC颗粒致密度逐渐增高,颗粒尺寸缓慢增大;当功率增大到2 400 W时,TaC颗粒致密度高且形貌规则,颗粒尺寸增加到35 nm左右。研究结果为TaC纳米颗粒的制备提供了新方法。Using the tantalum filament in the hot filament chemical vapor deposition(HFCVD)equipment as the hot source and tantalum source,TaC nanoparticles were directly prepared on the graphite substrate,and the effects of different hot filament power on the size and density of TaC particles were studied.The results show that when the hot filament power is 1600 W,the density of TaC particles is low,and the particle size is smaller(about 14 nm);as the power increases,the density of TaC particles gradually increases,and the particle size increases slowly;when the power increases to 2400 W,the TaC particles are dense with regular morphology,and the particle size increases to about 35 nm.The results provide more information for the preparation of TaC nanoparticles.

关 键 词：热丝化学气相沉积 石墨 TaC纳米颗粒 

分 类 号：TQ135.13[化学工程—无机化工]