加速度传感器的实现与检测  

Implementation and test of an accelerometer

作　　者：刘骅锋 杨正 严世涛 刘金全[1] LIU Hua-feng;YANG Zheng;YAN Shi-tao;LIU Jin-quan(School of Physics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学物理学院,湖北武汉430074

出　　处：《物理实验》2022年第11期20-26,共7页Physics Experimentation

基　　金：国家重点研发计划“智能传感器”专项项目资助(No.2021FYB3201603,No.2021FYB3201604)。

摘　　要：传感器实现和检测过程中涉及多种精密测量手段.介绍了加速度传感器的基本原理,包括加速度机械敏感结构、位移-电容转换、调制-解调信号提取、闭环反馈控制等内容,并给出了加速度传感器输入-输出模型和基本测试方法.设计了加速度传感器实验装置,包括加速度传感器组装的零部件、前放电路、用于信号检测的锁相放大器、传感器静态/动态标定仪器及其他辅助设备.加速度传感器的实现与检测结果表明:在开环和闭环工作模式下,对于微弱加速度信号的传感性能均符合实验设计和预期.A variety of precise measurement methods are involved in the process of sensor realization and detection.The basic principle of accelerometers,including the mechanical sensitive structure,conversion of displacement to capacitance,modulation-demodulation signal detection,closed-loop feedback control,et al,was introduced.The input-output model of accelerometers and the principal test methods were proposed.The experimental devices of acceleration sensor were designed,including the components of the accelerometer assembly,the front-end circuit,the lock-in amplifier used for signal detection,as well as the static/dynamic calibration instruments and other auxiliary equipment.The experimental results of the accelerometers showed that the sensing performance of weak acceleration signals in both open-loop and closed-loop modes was in accord with the experiment design and expectation.

关 键 词：加速度传感 锁相放大 微弱信号检测 反馈控制测试 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TP391.4[自动化与计算机技术—控制科学与工程]