SOI基可调谐微环光滤波器设计与性能测试  

Design and performance test of SOI-based tunable microloop optical filter

作　　者：袁玉霞[1] 杨瑞[1] YUAN Yuxia;YANG Rui(School of Electronic and Electrical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China)

机构地区：[1]郑州科技学院电子与电气工程学院,河南郑州450064

出　　处：《传感器与微系统》2022年第12期63-66,共4页Transducer and Microsystem Technologies

基　　金：2022年度河南省科技厅科技攻关项目(222102210318,222102310222);2021年河南省教育厅高等学校重点科研项目(21B510012)。

摘　　要：基于绝缘体上硅(SOI)制作了单环与双环滤波器,并且对其滤波特性进行研究,同时分析了光耦合系数对滤波器输出特性的影响。针对倏逝波耦合结构较弱的调谐能力,提出了马赫—曾德尔干涉仪(MZI)耦合器的改进结构,微环腔长均为1 314μm的单环和双环滤波器,对于单双环,当电极功率分别为18~40 mW和21~33 mW时,可实现滤波器从欠耦合到临界耦合的调谐,且双环滤波器的中心波长在直通端电极功率0~21 mW范围移动了1 nm,相当于一个自由频谱宽度。Single loop and double loop filters based on silicon on insulator(SOI)are fabricated, and their filtering characteristics are studied, at the same time, the influence of optical coupling coefficient on output characteristics of filters is analyzed.Aiming at the weak tuning ability of evanescent wave coupling structure, an improved structure of Mach-Zehnder interferometer(MZI) coupler is proposed.For single and double loop filters with the length of micro ring cavity of 1 314 μm, when the electrode power is in the range of 18~40 mW and 21~33 mW,respectively, the filter can be tuned from under coupling to critical coupling, and the center wavelength of the double loop filter shifts by 1 nm in the range of electrode power of 0~21 mW in direct end, which is equivalent to a free spectrum width.

关 键 词：绝缘体上硅 微环谐振器 马赫—曾德尔干涉仪 可调谐性 

分 类 号：TN256[电子电信—物理电子学]