基于MEMS陀螺仪谐振梁的不确定度分析  

Uncertainty analysis of MEMS gyroscope resonant beam

作　　者：李敏 曹乐 LI Min;CAO Le(School of Electronic and Electrical Engineering,Shanghai University of Engineering Science,Shanghai 201620,China)

机构地区：[1]上海工程技术大学电子电气工程学院,上海201620

出　　处：《传感器与微系统》2022年第12期139-142,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61703270)。

摘　　要：基于一种微机电系统(MEMS)陀螺仪谐振梁的振动模型,通过采用不确定度分析方法,分析了非线性振动系统下结构参数对等效固有频率的影响。建立基于样本的随机采样模型,将谐振梁的结构尺寸确定为模型的输入参数,采用蒙特卡洛采样方法对输入参数的取值进行随机抽样,并分析所选样本的收敛性。同时,量化分析各输入参数对等效固有频率的影响程度,从而获得影响谐振梁性能的关键性因素。上述结果可为MEMS陀螺仪敏感结构的设计及优化提供参考。Based on vibration model for a micro-electro-mechanical system(MEMS) gyroscope resonant beam, influence of structural parameters of nonlinear vibration system on equivalent natural frequency is analyzed by using uncertainty analysis.A sample-based random sampling model is established, and the structural size of the resonant beam is determined as the input parameter of the model.The Monte Carlo method is used for randomly sampling of the input parameter.Simultaneously, the convergent analysis of the selected samples is carried out.The influence degree of each input parameter on the equivalent natural frequency is quantitatively analyzed.So as to obtain the key factors that affect resonant beam.The above results can provide a reference for design and optimization of MEMS gyroscope sensitive structure.

关 键 词：微机电系统陀螺仪 不确定度分析 谐振梁 结构参数 随机模型 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH824[自动化与计算机技术—控制科学与工程]