复杂平面型微透镜阵列慢刀伺服加工研究  

Research on Slow Tool Servo Machining of Complicated Planar Microlens Array

作　　者：王爱博 刘杰[1] 赵清亮[1] WANG Aibo;LIU Jie;ZHAO Qingliang(School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001)

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001

出　　处：《机械工程学报》2022年第17期276-287,共12页Journal of Mechanical Engineering

基　　金：国家重点研发计划资助项目(2018YFA0703400)。

摘　　要：为满足多样的光学需求,平面型微透镜阵列(Microlens array,MLA)正逐步向复杂结构样式方向发展,例如,微透镜单元不等间隔排布。针对此类复杂MLA元件存在加工轨迹计算困难的问题,提出了一种慢刀伺服加工轨迹算法。按照加工轨迹计算流程,该算法主要包含三部分内容:首先,优化了等弧长-等角度混用离散算法;其次,提出了计算离散点Z坐标的通用算法;最后,提出了基于几何模型的刀尖圆弧半径Z向补偿算法。实验结果表明:对于等间隔排布的常规平面型MLA,所提算法的计算速度、面形误差PV值分别比商用超精密切削CAM软件对应结果提高32.62%、降低30.77%;对于微透镜单元按非等间隔排布且具有多样的正多边形轮廓的复杂平面型MLA,依据算法所得加工轨迹较好地加工出目标MLA。研究工作不仅可移植于快刀伺服加工,而且为复杂平面型MLA元件的研制提供了技术支撑。For meeting diversified optical requirements,planar microlens array(MLA)is gradually developing towards complex structure,for example,microlens units are arranged at irregular intervals.To solve the problem of the difficulty in calculating machining path for those complex MLA,an algorithm for slow tool servo cutting path is proposed.Based on calculation process,the algorithm mainly includes three parts.Firstly,equal arc length and equal angle hybrid discrete algorithm is optimized.Secondly,a general algorithm for computing the Z coordinates of discrete points is proposed.Finally,based on a geometrical model,an algorithm for compensating tool radius in Z-direction is developed.The experimental results show that for conventional MLA,whose microlens units are arranged at regular intervals,the calculation speed and surface error PV value of proposed algorithm are 32.62%higher and 30.77%lower than corresponding results of commercial CAM software for ultra-precision cutting,respectively.For complex planar MLA whose microlens units are arranged at unequal intervals and have various polygon contours,desired MLA is well machined by the cutting path from the algorithm.The research work not only is suitable for fast tool servo,but also provides technical support for the development of complex planar MLA.

关 键 词：微透镜阵列 复杂结构 慢刀伺服加工 加工轨迹 刀尖圆弧半径补偿 

分 类 号：TG659[金属学及工艺—金属切削加工及机床]