高性能Zn扩散掺镁LN晶体脊形波导器件的研究  

High Performance Zn Diffused Mg Doped LN Crystal Ridge Waveguide Devices

作　　者：陈中舆 程静欣 陈怀熹 冯新凯 张新彬 梁万国 CHEN Zhongyu;CHENG Jingxin;CHEN Huaixi;FENG Xinkai;ZHANG Xinbin;LIANG Wanguo(Fujian Institute of Research on the Structure of Matter,Chinese Academy of Sciences,Fuzhou 350002,China;University of Chinese Academy of Sciences,Beijing 100049,China;Fujian Science&Technology Innovation Laboratory for Optoelectronic Information of China,Fuzhou 350108,China;Key Laboratory of Electro-Optical Control and Security Technology,Tianjin 300308,China)

机构地区：[1]中国科学院福建物质结构研究所,福州350002 [2]中国科学院大学,北京100049 [3]中国福建光电信息科学与技术创新实验室(闽都创新实验室),福州350108 [4]光电信息控制和安全技术重点实验室,天津300308

出　　处：《人工晶体学报》2022年第11期1823-1829,共7页Journal of Synthetic Crystals

基　　金：中国福建光电信息科学与技术创新实验室(闽都实验室)自主部署项目(2021ZZ104);国防基础科研项目(JCKY2022210 C007)。

摘　　要：将铌酸锂(LiNbO_(3),LN)晶体制作成波导型结构能够进一步提高器件的集成度,已经广泛应用于电光调制器、频率变换、声光调Q等光电器件中,在光纤通信、光电传感、激光雷达、航天航空等领域具有重要的应用前景。传统的Ti扩散法制作的LN波导在短波应用中抗光折变损伤能力差,退火质子交换法制作的LN波导只能支持TM模(横磁模)单偏振传输,应用领域受限。本文提出了一种新型Zn扩散法制作掺镁LN脊形波导的方法,通过建立波导的扩散模型和仿真,探索制备的工艺条件并进行测试,得到的LN波导最低传输损耗为0.86 dB/cm,光折变损伤阈值可达到184 kW/cm^(2),这将为高功率铌酸锂波导集成光电器件的研发提供一种较好的制备途径。The waveguide structure made of lithium niobate crystal(LiNbO_(3),LN)can further improve the device integration.It has been widely used in electro-optical modulator,frequency conversion,acousto-optic Q-switching and other optoelectronic devices.It has important application prospects in optical fiber communication,photoelectric sensing,lidar,aerospace and other fields.The LN waveguide made by traditional Ti diffusion method has poor resistance to photorefractive damage in short wave applications.The LN waveguide made by annealing proton exchange method only support TM mode(transverse magnetic mode)single polarization transmission,and its application field is limited.In this paper,a new Zn diffusion method is proposed to fabricate magnesium doped LN ridge waveguide.By establishing the diffusion model and simulation of the waveguide,the technological conditions were explored and tested.The lowest transmission loss of LN waveguide is 0.86 dB/cm,and the photorefractive damage threshold can reach 184 kW/cm^(2).It will provide a better preparation way for the research and development of high power lithium niobate waveguide integrated optoelectronic devices.

关 键 词：掺镁铌酸锂晶体 光波导 波导器件 ZN扩散 高功率密度 传输损耗 

分 类 号：O734[理学—晶体学]