等离子体微波激发装置及其微波整流性能研究  

Study of microwave rectification effect by microwave-induced plasma

作　　者：王贝贝[1] 张卓越 王涛[1] 刘文博 侯静 钟宇 陈文琦 WANG Bei-bei;ZHANG Zhuo-yue;WANG Tao;LIU Wen-bo;HOU Jing;ZHONG Yu;CHEN Wen-qi(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065)

机构地区：[1]四川大学电子信息学院,成都610065

出　　处：《核聚变与等离子体物理》2022年第3期331-335,共5页Nuclear Fusion and Plasma Physics

基　　金：国家自然科学基金(61731013)。

摘　　要：根据在微波能量传输中可利用微波诱导等离子体进行微波整流的技术思路,制作了一款实验室用低压稳定等离子体激发装置。在2.45GHz的微波作用下,该装置可以将充气压强2666Pa的氖气激发形成等离子体,将电极置入等离子体后,可以检测到直流电压信号。研究了直流电压信号与微波激发功率、负载电阻值的关系,计算了其最大整流效率为0.05%。According to the technical idea of using microwave induced plasma for microwave rectification in microwave energy transmission,a low-pressure microwave-induced plasma fixture is presented.The fixture can generate plasma in a neon bulb with the 2.45GHz microwave.A DC signal can be detected as long as the electrodes loaded in plasma.This work has investigated the rectified voltage dependence on the microwave excitation power,and the load resistance,respectively.The rectification efficiency can reach a maximum of 0.05%.

关 键 词：微波能量传输 微波整流 微波等离子体 等离子体鞘层 

分 类 号：TM15[电气工程—电工理论与新技术]