一维线纹激光比长测量装置及其关键技术  

Measuring Device of One-Dimensional Linear Laser Length Measurement Device and its Key Technology

作　　者：王理 杨璐 李文慧 肖克 孙双花[2] WANG Li;YANG Lu;LI Wenhui;XIAO Ke;SUN Shuanghua(Hunan Institute of Metrology and Test,Changsha 410014,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]湖南省计量检测研究院,长沙410014 [2]中国计量科学研究院,北京100029

出　　处：《计量科学与技术》2022年第9期3-11,共9页Metrology Science and Technology

基　　金：国家重点研发计划项目(2019YFF0216804)。

摘　　要：介绍了几何量测量领域中一维线纹激光比长测量关键技术和装置的研究成果,涉及了国内外相关计量技术机构在一维线纹方面的测量能力和范围、装置的基本组成及其工作原理,以及激光干涉法测长和光电显微镜法自动对焦实现线纹刻线快速瞄准等方面的内容。详细阐述了我国一维线纹激光比长测量装置的研究现状,重点分析该装置所应用的关键技术的特点,以及目前的测量水平和能力。根据目前我国一维线纹测量的技术发展状况,从线纹量值溯源和装备制造产业发展两个角度讨论了一维线纹激光比长测量装置的应用前景。This paper introduces the research results of the critical technologies and devices for one-dimensional linear laser length measurement in the field of geometric measurement,covering the frontiers of metrological technical institutions at home and abroad in the field of one-dimensional lines,measurement capability and range,elemental composition and working principle of the device,as well as the laser interference method for length measurement and the photoelectric microscope method for auto-focusing to achieve fast targeting of line pattern inscriptions.The research status of the onedimensional linear laser length measurement device in China is elaborated,focusing on the characteristics of the critical technologies applied in the device and the current measurement level and capability.According to the recent technical development of one-dimensional linear measurement in China,the application prospect of one-dimensional linear measurement devices is discussed from two perspectives of line measurement value traceability and equipment manufacturing industry development.

关 键 词：线纹测量 激光比长仪 激光干涉仪 光电显微镜 测量装置 

分 类 号：TN247[电子电信—物理电子学]