毛细管型真空漏孔及其计量特性研究  

Study on Capillary Vacuum Leak and its Metrological Characteristics

作　　者：赵澜[1] 成永军[1] 孙雯君[1] 曾翔 翁俊 董猛[1] 陈联[1] 管保国[1] 张瑞芳[1] 陈会颖[1] 孙冬花[1] 丁栋[1] 冯天佑[1] 李明 张旭 ZHAO Lan;CHENG Yongjun;SUN Wenjun;ZENG Xiang;WENG jun;DONG Meng;CHEN Lian;GUAN Baoguo;ZHANG Ruifang;CHEN Huiying;SUN Donghua;DING Dong;FENG Tianyou;LI Ming;ZHANG Xu(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;AECC Chengdu Engine CO.LTD,Chengdu 610000,China;Shanghai Precision Metrology&Test Research Institute,Shanghai 202200,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]中国航发成都发动机有限公司,成都610000 [3]上海精密计量测试研究所,上海202200

出　　处：《真空与低温》2022年第6期713-719,共7页Vacuum and Cryogenics

基　　金：中国空间技术研究院杰出青年人才(第三类)项目。

摘　　要：自主研制了毛细管型真空漏孔,介绍了其结构组成。对该漏孔的温度特性、年衰减率、重复性及稳定性进行了实验研究。结果表明,该漏孔的温度系数小于1.0%,年衰减率小于1.0%,重复性小于0.3%,采用氦质谱检漏仪实际使用12 h稳定性小于1.0%。研制的毛细管型真空漏孔在真空检漏中具有广泛应用前景。The capillary vacuum leak was developed,and its structural composition was described in detail.The temperature characteristics,annual decay rate,repeatability and stability of the leak were studied experimentally.The results show that the temperature coefficient of the leak is less than 1.0%,the annual decay rate is smaller than 1.0%,the repeatability is less than 0.3%,and the stability is less than 1.0%in 12 hours by using helium mass spectrometer leak detector.The developed capillary leak is widely used in vacuum leak detection.

关 键 词：毛细管型 真空漏孔 温度系数 年衰减率 重复性 稳定性 

分 类 号：TB774[一般工业技术—真空技术]