微半球壳谐振子高温吹制工艺仿真及形貌影响机理研究  

High-Temperature Blowing Process Simulation and Study on Shape Influence Mechanism of Micro-Hemispheric Shell Harmonic Oscillator

作　　者：高阳 丁徐锴 张含 孟琳 GAO Yang;DING Xukai;ZHANG Han;MENG Lin(AI Institute of Industrial Technology,Nanjing Institute of Technology,Nanjing 211167,China;School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;School of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology ZiJin College,Nanjing 210023,China)

机构地区：[1]南京工程学院人工智能产业技术研究院,江苏南京211167 [2]东南大学仪器科学与工程学院,江苏南京210096 [3]南京理工大学紫金学院电子工程与光电技术学院,江苏南京210023

出　　处：《测试技术学报》2023年第1期5-10,17,共7页Journal of Test and Measurement Technology

基　　金：江苏省自然科学基金资助项目(BK20201042);南京工程学院高层次人才引进启动基金资助项目(YKJ201866);国家自然科学基金资助项目(61903183)。

摘　　要：基于传统半球陀螺仪精度高、寿命长、可靠性高的优点以及MEMS器件体积小、重量轻、可批量生产、易于数字化等特点,微半球谐振陀螺仪兼备微小体积与中高精度的潜力,是当下微型陀螺仪的研究热点。微半球壳谐振子的高温吹制法制备工艺具有实现高性能的潜力和可批量化生产的优势,是谐振子制备工艺的重要方向。但是,此工艺方法下谐振子为一次成型,且难以后期修调。本文基于高温吹制法工艺原理建立了工艺仿真模型,可以直观地揭示微半球壳成型过程并准确地预测微半球壳的最终形貌;此外,结合形貌影响因素分析,详细探讨了玻璃厚度、基底环形槽几何参数、环形槽腔体内外压强比等主要因素对谐振子形貌的影响机理,可为微半球壳谐振子形貌控制提供重要依据。Based on the characteristics of high precision,long life,and high reliability of traditional hemispherical gyroscopes,as well as the characteristics of small size,lightweight,mass production,and easy digitization of MEMS devices,micro-hemispherical resonant gyroscopes have the potential of both small size and medium-high precision.Research hotspots of micro gyroscopes.The high-temperature blowing preparation process of the micro-hemispherical shell harmonic oscillator has the potential to achieve high performance and the advantage of mass production.It is an essential direction of the harmonic oscillator manufacturing process.However,in this process,the harmonic oscillator is formed at one time,making it difficult to adjust it later.In this paper,a process simulation model is established based on the process principle of the high-temperature blowing method,which can intuitively reveal the forming process of the micro hemispherical shell and accurately predict the final morphology of the micro hemispherical shell.The influence mechanism of the main factors such as glass thickness,geometric parameters,and the ratio of pressure inside and outside the annular groove cavity on the shape of the resonator can provide an important basis for the control of the shape of the micro-hemispherical shell resonator.

关 键 词：微半球壳 MEMS陀螺仪 高温吹制工艺 工艺仿真 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]