电子束增材制造聚焦消像散控制技术研究  

Research on Focusing and Astigmatism Elimination Control Technology of Electron Beam Additive Manufacturing

作　　者：孙博彤 殷伯华[1,2] 王鹏飞 刘俊标 韩立[1] SUN Botong;YIN Bohua;WANG Pengfei;LIU Junbiao;HAN Li(Micro-nano Fabrication Technology Department,Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院电工研究所微纳加工技术研究部,北京100190 [2]中国科学院大学电子电气与通信工程学院,北京100049

出　　处：《热加工工艺》2022年第21期117-121,126,共6页Hot Working Technology

基　　金：国家重点研发计划项目(2018YFB1105202)。

摘　　要：为解决电子束增材制造设备加工范围受限、大尺寸工件边缘加工精度下降等问题,对大偏角下电子束的散焦和像散进行研究。采用像差理论对电子束偏转过程中出现的束径增大、形状畸变现象进行分析。本研究搭建控制系统,动态调整聚焦线圈和消像散线圈的电流,即动态聚焦消像散。制作聚焦消像散校正表,使电子束在整个扫描区域内保持小束径。采用二次电子成像方法和EOG(能量梯度函数)评价函数验证校正效果。实验结果表明,动态聚焦消像散能够有效改善束斑质量,校正后电子束在12°偏转以内清晰成像,电子图像EOG值由0.81提升至1。In order to solve the limited processing range of the electron beam manufacturing equipment and reduced processing accuracy at the edge of large workpieces, the defocusing and astigmatism of the electron beam at large deflection angle were studied. The aberration theory was used to analyze beam size increasing and shape distortion during electron beam deflection. A control system was set up to dynamically adjust the current of the focus coil and the astigmatism coil, that is,dynamic focusing and astigmatism elimination. Then a focused astigmatism correction table was made to reduce beam spot size of the electron beam within the whole field. Then, the secondary electronic imaging method and EOG(energy of gradient)evaluation function were used to verify the correction effect. The experimental results show that dynamic focusing and astigmatism elimination can effectively improve the beam spot quality. After correction, the electron beam can have a clear image within 12°, and the EOG value of the electronic image is increased from 0.81 to 1.

关 键 词：电子束选区熔化 增材制造 动态聚焦 消像散 

分 类 号：TG439.3[金属学及工艺—焊接]