溅射靶材用Cr20Ni80合金管材的微观组织与再结晶退火  

Microstructure and recrystallization annealing of Cr20Ni80 alloy pipe used for sputtering target

作　　者：段旭斌 吴宇宁 袁志钟[1] 王梦飞 卿海标 钟成铭 罗锐[1] 程晓农[1] Duan Xubin;Wu Yuning;Yuan Zhizhong;Wang Mengfei;Qin Haibiao;Zhong Chengming;Luo Rui;Cheng Xiaonong(School of Materials Science and Engineering,Jiangsu University,Zhenjiang Jiangsu 212013,China;Nanjing Damai Science&Technology Industry Co.,Ltd.,Nanjing Jiangsu 211102,China)

机构地区：[1]江苏大学材料科学与工程学院,江苏镇江212013 [2]南京达迈科技实业有限公司,江苏南京211102

出　　处：《金属热处理》2022年第11期12-19,共8页Heat Treatment of Metals

基　　金：江苏省成果转化项目(BA2018030)。

摘　　要：对溅射靶材用Cr20Ni80合金冷轧管材的微观组织和再结晶退火工艺进行了研究。首先观察了冷轧管材轴向与径向的微观组织变化;其次利用JMatPro计算了Cr20Ni80合金的相图,并设计了再结晶退火工艺;最后对冷轧管材进行了再结晶退火试验,表征了退火后管材的微观组织、晶粒尺寸和硬度。结果表明,冷轧管材沿轴向均为拉长晶,且存在大量孪晶;管材沿径向的微观组织中晶粒尺寸因形变量的增大而减小;当再结晶退火温度为690℃时,冷轧管材试样已开始发生再结晶;790℃×30 min时,形变晶粒已完全再结晶,平均晶粒尺寸为24.1μm,为最优再结晶退火工艺;当退火温度进一步升高、保温时间进一步延长时,再结晶晶粒逐渐长大;试样的硬度随退火温度的升高而减小。Microstructure and recrystallization annealing process of cold-rolled Cr20 Ni80 alloy pipe used for sputtering target were studied.Firstly,the microstructure variation along the axial and radial directions of the cold-rolled pipe was observed.Secondly,the phase diagram of the Cr20 Ni80 alloy was calculated by JMatPro and the recrystallization annealing process was designed.Finally,the recrystallization annealing processes were carried out and the microstructure,grain size and hardness were characterized.The results show that the microstructure of the cold-rolled pipe along the axial direction is all elongated crystals,and there are a lot of twins.The grain size of the pipe along the radial direction decreases due to the increase of deformation.The cold-rolled pipe begins to recrystallize when the recrystallization annealing temperature is 690℃.The deformed grains have been completely recrystallized at 790℃for 30 min,and the average grain size is 24.1μm,which is the optimal recrystallization annealing process.The recrystallized grains of the specimen gradually grow as the temperature is further increased and the holding time is prolonged.Moreover,the hardness decreases with the increase of annealing temperature.

关 键 词：溅射靶材 Cr20Ni80合金 再结晶退火 微观组织 硬度 

分 类 号：TG166.7[金属学及工艺—热处理]