无结场效应晶体管生化传感器研究进展  

Research Progress on Junctionless Field Effect Transistor Biochemical Sensors

作　　者：姜齐风 张静[1] 魏淑华[1] 张青竹[2] 王艳蓉 李梦达 胡佳威 闫江 Jiang Qifeng;Zhang Jing;Wei Shuhua;Zhang Qingzhu;Wang Yanrong;Li Mengda;Hu Jiawei;Yan Jiang(College of Information,North China University of Technology,Bejing 100144,China;Integrated Circuit Advanced Process R&DCenter,Institute of Microelectronics,ChineseAcademyof Sciences,Beijing100029,China)

机构地区：[1]北方工业大学信息学院,北京100144 [2]中国科学院微电子研究所先导工艺研发中心,北京100029

出　　处：《半导体技术》2022年第11期854-864,共11页Semiconductor Technology

摘　　要：基于无结场效应晶体管(JLFET)的生化传感器制备工艺简单,不存在传统场效应晶体管(FET)源漏结构引起的pn结杂质扩散等问题,因而备受重视。以工作机制可将其分为离子敏感型与介电调制型两大类,分别通过电解液向半导体转移电荷和调制栅介质电容使传感器阈值电压及电流发生变化以达到探测生化物质的目的。综述了两类JLFET生化传感器的工作原理,列举该器件在不同材料、结构等方面的改进并介绍其性能,以供微纳电子学与生物化学交叉学科领域的研究者参考。Biochemical sensors based on junctionless field effect transistors(JLFETs)have been paid more and more attention because of their simple fabrication process and no impurity diffusion at pn junction caused by source-drain structure in conventional field effect transistors(FETs).According to the working mechanism,it can be divided into two types:ion-sensitive type and dielectric modulation type.The threshold voltage and current of the sensor are changed by the charge transfering from electrolyte to semiconductor and modulation of the gate dielectric capacitance respectively to detect biochemical substances.The working principles of two kinds of JLFET biochemical sensors are reviewed,the improvements of the devices in different materials and structures are listed,and their performances are introduced for reference by researchers in the interdisciplinary field of micro-nanoelectronics and biochemistry.

关 键 词：无结场效应晶体管(JLFET) 生化传感器 电解质 传感层 介电调制 

分 类 号：TN386[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]