U型微电热驱动器理论模型及瞬态位移特性  

Theoretical model and transient displacement characteristics of U-shaped electrothermal actuator

作　　者：卢星帆 王新杰[1] 陈浩[1] LU Xingfan;WANG Xinjie;CHEN Hao(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学机械工程学院,南京210094

出　　处：《哈尔滨工业大学学报》2023年第1期24-31,共8页Journal of Harbin Institute of Technology

基　　金：国家自然科学基金(52075263)。

摘　　要：针对电热驱动器材料参数受温度的非线性影响以及简化模型中存在的非连续性边界问题,开展U型电热驱动器的瞬态位移特性研究。引入与温度相关的材料更新函数,根据能量守恒方程等热力学理论以及虚功原理等材料力学理论建立U型电热驱动器的电-热-力耦合模型。利用改进型切比雪夫谱方法求解所构建的耦合模型,得到U型电热驱动器温度和瞬态位移表达式;对U型电热驱动器瞬态位移进行有限元仿真和理论分析,理论分析和仿真结果大致相同,验证了模型的正确性。搭建电热驱动器瞬态位移特性实验平台,将恒定电压激励下的U型电热驱动器位移响应实验结果与理论和仿真结果进行对比分析,并对周期性正弦电压作用下驱动器的瞬态位移特性进行了测试和分析,结果表明:一段时间后U型微电热驱动器位移变化趋势同样呈现正弦规律变化,且变化周期与电压周期相等;U型微电热驱动器的位移变化幅度与电压峰峰值正向变化,与电压频率负向变化。所获得的瞬态位移变化规律为U型微电热驱动器在微机电系统中的动态驱动应用奠定了基础。Considering that material parameters of U-shaped electrothermal actuators are affected by the temperature nonlinearity and the discontinuous boundary problem in the simplified model,the transient displacement characteristics were studied.By introducing temperature-related material renewal functions,based on thermodynamic theories such as energy conservation equations and material mechanics theories such as virtual work principles,the electro-thermal-mechanical coupling model of U-shaped electrothermal actuators was established.The improved Chebyshev spectrum method was used to solve the constructed coupling model,and the expression of temperature and transient displacement of U-shaped electrothermal actuator was obtained.The results of finite element simulation and theoretical analysis were basically the same,verifying the correctness of the model.An experimental platform for the transient displacement characteristics of the electrothermal driver was built,and the displacement response experimental results of the U-shaped electrothermal driver under constant voltage excitation were compared with the theoretical and simulation results.The transient displacement characteristics of the driver under the action of a periodic sinusoidal voltage were analyzed.The test and analysis results show that the displacement change trend of the U-shaped micro-electric thermal driver showed a sinusoidal change after a period of time,and the change period was equal to the voltage period;the displacement change range varied positively with the peak-to-peak voltage,and negatively with the change in voltage frequency.

关 键 词：电热驱动 瞬态位移特性 耦合 切比雪夫谱方法 边缘检测 微动态测量 

分 类 号：TH122[机械工程—机械设计及理论]