3ω测试方法中电极宽度对热辐射影响  

Study on the influence of thermal radiation by width of the electrode in 3ω measurement method

作　　者：李灏 翟玉卫[1] 刘岩[1] 赵丽 丁晨[1] 吴爱华[1] Li Hao;Zhai Yuwei;Liu Yan;Zhao Li;Ding Chen;Wu Aihua(The 13th Research Institute of CETC)

机构地区：[1]中国电子科技集团公司第十三研究所

出　　处：《上海计量测试》2022年第4期2-4,8,共4页Shanghai Measurement and Testing

摘　　要：针对3ω导热系数测试方法中热辐射对测量结果的影响,利用有限元仿真手段,对线宽因素和热辐射效应关系进行了研究。结果显示,在仿真模型条件下,辐射热流量随电极线宽增大而增大,且曲线斜率以100μm为拐点有显著提升。分析表明:在100μm以上线宽范围,辐射强度对线宽尺寸较为敏感,减小线宽能够获得较明显的辐射抑制收益;在100μm范围,减小线宽对辐射的抑制作用相对弱化。研究结果能够为3ω电极设计提供参考,进一步提升方法测试准确性。Aiming at the influence of the result in 3ω measurement method by thermal radiation, conduct a research on the relation between the width of the test electrode and radiation energy using the FEM simulation tool. Results show that the radiant heat flux increase with the width of the electrode in the simulation model, while the slope of the curve became larger observably at the 100 μm inflection point. Analysis suggests that when the width locates in the range above 100 μm, radiation intensity is sensitive to the width value, decrease of width could lead to an obvious benefits on inhibition of the radiation. Conversely, the inhibition got weak when the width is under 100 μm. The result of the study could offer reference to the design of the electrode, which could promote the currency of the 3ω measurement method.

关 键 词：3ω法 导热系数 热辐射 有限元仿真 电极宽度 

分 类 号：TN30[电子电信—物理电子学] TK124[动力工程及工程热物理—工程热物理]