基于离散化路径与拼接的高精度光学检测方法  

High-precision optical measurement method based on discrete path and splicing

作　　者：沈正祥[1,2] 王旭[1,2] 余俊[1,2] Shen Zhengxiang;Wang Xu;Yu Jun(Key Laboratory of Advanced Micro-Structure Materials,Ministry of Education,Tongji University,Shanghai 200092,China;Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学先进微结构材料教育部重点实验室,上海200092 [2]同济大学物理科学与工程学院精密光学工程技术研究所,上海200092

出　　处：《红外与激光工程》2022年第11期316-325,共10页Infrared and Laser Engineering

基　　金：国家自然科学基金(11873004,61621001)。

摘　　要：在超精密光学元件制造中,高精度光学检测技术是进一步提升光学加工精度和表征评价光学表面形貌的基础关键。非接触式光学检测方法凭借高效和无损伤检测的特点,取得广泛应用。但外界环境扰动容易对光学检测探针产生影响,降低检测精度。为此,文中提出了一种离散化检测路径与拼接方法,将传统螺旋线路径离散为多圆周和多径向路径,并通过路径间数据的相互拼接,减小了环境扰动误差。分析了离散化检测路径的参数设置,给出了一种均匀化的圆周路径分布策略。最后,基于自行搭建的光学检测平台,进行了环境误差抑制方法的验证实验。相较于抑制前的面形,抑制后的测量相对误差从24.3%降到了4.3%。In the manufacturing of ultra-precision optical elements,high-precision optical detection technology is the key to further improve the optical processing accuracy and to characterize and evaluate the optical surface morphology.Non-contact optical detection method has been widely used because of its high efficiency and no damage detection.But the external environment disturbance can easily affect the optical probe and reduce the detection accuracy.Therefore,a method of discrete detection path and splicing is proposed in this paper.The traditional spiral path is divided into multi-circular and multi-path paths.The compensation of environmental disturbance error is realized by the data splicing between paths.The parameter setting of discrete detection path is analyzed,and a uniform distribution strategy of circular path is given.Finally,based on the optical detection platform,the verification experiment of the compensation method of environmental error is carried out.Compared with the uncompensated results,the measurement relative error is reduced from 24.3%to 4.3%.

关 键 词：光学检测 环境误差 路径规划 数据拼接 

分 类 号：O439[机械工程—光学工程]