测试探针性能检测系统的设计与实现  

Design and realization of detection system for the test probe performance

作　　者：汪俞成 肖金球[1,2] 李盈 焦文开 谢翔 Wang Yucheng;Xiao Jinqiu;Li Ying;Jiao Wenkai;Xie Xiang(College of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China;Intelligent Measurement and Control Engineering Technology Research Center,Suzhou 215009,China)

机构地区：[1]苏州科技大学物理科学与技术学院,苏州215009 [2]苏州市智能测控工程技术研究中心,苏州215009

出　　处：《国外电子测量技术》2022年第10期97-103,共7页Foreign Electronic Measurement Technology

基　　金：江苏省产学研前瞻性重点项目(BY2011132);江苏省住房和城乡建设厅科技项目(341731604);江苏省研究生创新工程基金(KYCX21_3010)项目资助。

摘　　要：为满足国内厂商对集成电路测试中测试探针出厂检测的要求,分析了测试探针需要检测的功能、参数和测试方法,利用压力传感器、温度传感器、激光位移传感器、电阻测量计、运动模块执行机构以及控制与数据采集模块,设计了一种以LabVIEW为核心的多功能测试探针性能检测系统,实现了对测试探针性能的自动测试。实验结果表明,所设计系统能够对测试探针进行有效的性能检测,测量误差小于±4%,测试时间比传统人工测量提高了5倍左右,检测系统性能稳定,显著提升了测试效率和测试精度。In order to meet the requirements of domestic manufacturers for the ex-factory testing of test probes in integrated circuit testing, this paper analyzes the functions, parameters and test methods of the test probe. Using pressure sensor, temperature sensor, laser displacement sensor, resistance meter, motion module actuator and control and data acquisition module, a multifunctional test probe performance detection system based on LabVIEW is designed, which realizes the automatic test of the test probe. The experimental results show that the designed system can effectively detect the performance of the test probe. The measurement error is less than ±4 %, and the test time is about 5 times higher than that of the traditional manual measurement. The system performance is stable, and the test efficiency and accuracy are significantly improved.

关 键 词：测试探针 性能参数 LABVIEW 测量测试 

分 类 号：TN4[电子电信—微电子学与固体电子学]