四极质谱仪质量分辨指标的系统分析与航天应用  

Systematic analysis and aerospace application of mass resolutionindex of quadrupole mass spectrometer

作　　者：徐波 蔡红华 黄刚 曾固 刘俊杰 丁传凡 XU Bo;CAI Honghua;HUANG Gang;ZENG Gu;LIU Junjie;DING Chuanfan(Astronaut Scientific Research and Training Center,Beijing 100094,China;Institute of Mass Spectrometry,Ningbo University,Ningbo 315211,China)

机构地区：[1]航天员科研训练中心,北京100094 [2]宁波大学质谱技术与应用研究院,浙江宁波315211

出　　处：《传感器与微系统》2023年第1期154-157,共4页Transducer and Microsystem Technologies

摘　　要：为满足长期工作、生活的太空密闭空间微量有害气体体积分数的检测需求,在重量、体积和功耗等约束条件下,均衡设计航天质谱仪的各项技术指标。系统分析了影响四极质谱仪质量分辨的主要因素:四极质量分析器的机械加工与装配精度对质量分辨的影响系数为1/Δr;质量分析器电极的杆半径与场半径的比值为1.145时,质量分辨较优;电极的长度对质量分辨影响呈线性;质量分辨正比于射频(RF)电源频率的平方;质量范围为200 u时,要实现0.1 u的仪器稳定性,频率的稳定性须优于0.025%;质量分辨与RF电源的电压峰值稳定性线性相关等。设计并研制了航天质谱仪,在功耗为42.59 W,RF电源重量为2.78 kg、质量分析器重量为1.13 kg约束下,质量数为131 u处获得了优于131的质量分辨。In order to meet the detection requirement of trace harmful gas volume fraction in space confined space for long-term work and life,the technical indicators of aerospace mass spectrometer are designed in a balanced manner under the constraint condition of weight,volume and power consumption.The main factors affecting the mass resolution of quadrupole mass spectrometer are systematically analyzed:the influence coefficient of machining and assembly precision of the quadrupole mass analyzer on mass resolution is 1/Δr;when the ratio of the rod radius of the mass analyzer electrode to the field radius is 1.145,the mass resolution is better;the length of the electrode has a linear effect on mass resolution;the mass resolution is proportional to the square of the radio frequency(RF)power frequency;with a mass range of 200 u,to achieve 0.1 u instrument stability,frequency stability must be prior to 0.025%;mass resolution is linearly related to the voltage peak stability of the RF power supply.An aerospace mass spectrometer is designed and developed.Under the constraints of power consumption of 42.59 W,mass of RF power supply of 2.78 kg,and weight of mass analyzer of 1.13 kg,a mass resolution prior to 131 is obtained at 131 u.

关 键 词：四极质谱仪 四极质量分析器 质量分辨 机械精度 射频电源 

分 类 号：V447[航空宇航科学与技术—飞行器设计] TP212[自动化与计算机技术—检测技术与自动化装置]