络合剂对316L不锈钢化学机械抛光效果的影响  

Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel

作　　者：陈国美 杜春宽[1] 倪自丰 卞达 王浩 章平 张鑫 CHEN Guomei;DU Chunkuan;NI Zifeng;BIAN Da;WANG Hao;ZHANG Ping;ZHANG Xin(School of Intelligent Equipment and Automotive Engineering,Wuxi Vocational Institute of Commerce,Wuxi 214153,Jiangsu,China;School of Mechanical Engineering,Jiangnan University,Wuxi 214122,Jiangsu,China)

机构地区：[1]无锡商业职业技术学院智能装备与汽车工程学院,江苏无锡214153 [2]江南大学机械工程学院,江苏无锡214122

出　　处：《金刚石与磨料磨具工程》2022年第6期753-759,共7页Diamond & Abrasives Engineering

基　　金：国家自然科学基金(52205196);江苏省高校自然科学研究项目(19KJB460023);江苏省高校青蓝工程(2021);无锡商业职业技术学院超精密加工与智能制造科研创新团队(XTD202107);无锡商业职业技术学院智能制造与服务协同创新中心科研平台(KYPT20309);无锡商业职业技术学院机器视觉工程技术中心科研平台(KYPT21304)。

摘　　要：为提高316L不锈钢化学机械抛光(chemical-mechanical polishing,CMP)效率,针对络合剂类型对316L不锈钢加工效果的影响及影响机制进行研究。以材料去除率(material removal rate,MRR)和表面粗糙度(Ra)为指标,探究络合剂类型(甘氨酸、草酸和柠檬酸)及浓度对抛光效果的影响。利用电化学工作站、接触角测量仪和X射线光电子能谱仪(XPS)分析络合剂对316L不锈钢CMP加工影响机制。结果表明:当甘氨酸质量分数为0.2%时,能够同时获得较高的材料去除率和较低的Ra,分别为210 nm/min和1.613nm。高浓度的络合剂对316L不锈钢材料去除率的抑制作用来源于络合剂增强了316L不锈钢表面耐蚀性,降低了表面氧化速度。XPS分析表明部分甘氨酸络合物会吸附于316L不锈钢表面产生缓蚀作用。To improve the chemical mechanical polishing(CMP) performance of 316L stainless steel, the effect and its mechanism of complexing agent types on the CMP process of 316L stainless steel were studied. The influence of complexing agent types, including glycine, oxalic acid and citric acid, and their concentrations on polishing performance of316L stainless steel were investigated with material removal rate(MRR) and surface roughness Ra as indexes. Electrochemical workstation, contact angle measuring instrument and X-ray photoelectron spectroscopy(XPS) were performed to analyze the affecting mechanism of complexing agents on 316L stainless steel CMP processing. The results indicated that only when the mass fraction of glycine was 0.2%, both higher MRR of 210 nm/min and lower Ra of 1.613nm could be obtained. The inhibition effect of complexing agent with high concentration on 316L stainless steel MRR was because the complexing agent enhanced the corrosion resistance and reduced the oxidation rate of 316L stainless steel surface. The XPS results showed that part of glycine complex would be attached on the surface of 316L stainless steel to produce corrosion inhibition.

关 键 词：化学机械抛光 316L不锈钢 络合剂 电化学 芬顿反应 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TG732