基于自适应逆控制的压电驱动电源  

Research on Piezoelectric Drive Power with Adaptive Inverse Control

作　　者：杜建周 陈远晟 刘绍娜 王舟 DU Jianzhou;CHEN Yuansheng;LIU Shaona;WANG Zhou(College of Material Science and Engineering,Yancheng Institute of Technology,Yancheng 224051,China;School of Energy and Power Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]盐城工学院材料科学与工程学院,江苏盐城224051 [2]南京理工大学能源与动力工程学院,江苏南京210094

出　　处：《压电与声光》2022年第6期901-906,共6页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划“高性能制造技术与重大装备”重点专项(No.2021YFB3400100);盐城工学院校级科研项目资助(No.xjr2021016)。

摘　　要：为了减少压电驱动器迟滞非线性,提高微系统的定位精度,该文设计了基于自适应逆控制的压电驱动电源。选用型号TMSF320F28335的数字信号处理(DSP)芯片,对信号调节器、前级DC-DC的Boost升压电路和后级DC-AC的单相全桥逆变电路进行设计分析。在CCS6.0软件开发环境下进行编程,实现了SPWM驱动信号的生成、对位移信号进行AD采样和Prandtl-Ishlinskii自适应逆模型的功能。为了验证所设计的压电驱动电源的自适应控制性能,采用压电陶瓷驱动器开展了基于自适应逆的驱动控制实验。结果表明,在不采用控制的条件下,1 Hz时压电陶瓷驱动器的输出位移均方根误差(RMSE)为3.239 5μm,绝对值平均误差(MAE)为2.985 1μm;随着频率的增加,20 Hz时RMSE、MAE的最大值分别为21.402 9μm、19.306 2μm。使用基于自适应逆控制的压电驱动电源,1 Hz时RMSE为0.324 9μm, MAE为0.265 6μm;20 Hz时压电陶瓷驱动器的输出位移RMSE为12.639μm, MAE为11.956 1μm。In order to reduce the hysteresis nonlinearity of piezoelectric actuators and improve the positioning accuracy of microsystems, a piezoelectric drive power with the adaptive inverse control is designed in this paper. The signal conditioner, the Boost circuit of the front stage DC-DC and the single-phase full-bridge inverter circuit of the post stage DC-AC were analyzed and designed using the model TMSF320F28335 digital signal processing(DSP) chip. The functions of SPWM drive signal generation, AD sampling of displacement signals, and Prandtl-Ishlinskii adaptive inverse model have been realized by programming under the CCS6.0 software development environment. To validate the adaptive control performance of the designed piezoelectric drive power, the driving control experiments based on the adaptive inverse have carried out with piezoelectric ceramic actuator. The experimental results show that the root mean square error(RMSE) at 1Hz is 3.239 5 μm and the average error of mean absolute error(MAE) is 2.985 1 μm without the control. With the increase of frequency, the maximum values of RMSE and MAE at 20Hz are 21.402 9 μm and 19.306 2 μm, respectively. By using the piezoelectric drive power with the adaptive inverse control, the RMSE is 0.324 9 μm and the MAE is 0.265 6 μm at 1 Hz, and the RMSE is 12.639 μm and the MAE is 11.956 1 μm at 20 Hz.

关 键 词：压电驱动器 压电驱动电源 迟滞补偿 Prandtl-Ishlinskii模型 自适应逆 

分 类 号：TM282[一般工业技术—材料科学与工程] TN86[电气工程—电工理论与新技术]