链状碳纳米管的制备及其场发射性能研究  

Preparation of Chained Carbon Nanotubes and Study on Its Field Electron Emission Characteristics

作　　者：高金海 张洁[3] 李成刚 张兵临 GAO Jinhai;ZHANG Jie;LI Chenggang;ZHANG Binglin(School of Physics and Electrical Engineering,Zhengzhou Normal University,Zhengzhou He’nan 450044,China;Key Laboratory of Material Physics of the Ministry of Education,School of Physical Engineering,Zhengzhou He’nan 450052,China)

机构地区：[1]郑州师范学院物理与电子工程学院物理系,河南郑州450044 [2]郑州大学物理工程学院材料物理教育部重点实验室,河南郑州450052 [3]郑州师范学院物理与电子工程学院,河南郑州450044

出　　处：《电子器件》2022年第6期1354-1357,共4页Chinese Journal of Electron Devices

基　　金：河南省科技攻关项目(182102210140)。

摘　　要：利用微波等离子体化学气相沉积的方法,在钛金属层上快速制备出由众多内部中空、外观呈锥形链状的碳纳米管组成的碳膜。通过扫描电镜、透射电镜、拉曼光谱等仪器分析了碳纳米管的组成。在真空条件下,测量了碳纳米管链薄膜的场电子发射特性。用热动力学过程解释了锥形碳纳米链的生长机理。Carbon films composed of many hollow carbon nanotubes with conical appearance are rapidly prepared through microwave plasma chemical vapor deposition(CVD)on titanium metal layers.The composition of carbon nanotubes is analyzed by using scanning electron microscopy,transmission electron microscopy and Raman spectroscopy.The field electron emission characteristics of the films of carbon nanotube chains are measured in vacuum.The growth mechanism of conical carbon nanochains is explained by thermodynamic process.

关 键 词：微波等离子体化学气相沉积 碳纳米管链 场发射 

分 类 号：TB383[一般工业技术—材料科学与工程] O484[理学—固体物理]