基于AZO的光谱选择性反射膜制备及其在聚光器中的应用研究  

Preparation of Spectral Selective Reflection Film Based AZO and Application in Concentrator

作　　者：王成龙[1,2] 周渊 王锐东[1,2] 马军 WANG Chenglong;ZHOU Yuan;WANG Ruidong;MA Jun(National Engineering Research Center for Technology and Equipment of Environmental Deposition,Lanzhou Jiaotong University,Lanzhou 730070,China;Collaborative Innovation Center for Technology and Equipment of Concentrated Solar Power,Lanzhou Jiaotong University,Lanzhou 730070,China)

机构地区：[1]兰州交通大学国家绿色镀膜技术与装备工程技术研究中心,兰州730070 [2]兰州交通大学聚光太阳热能产业关键技术与装备省部共建协同创新中心,兰州730070

出　　处：《真空与低温》2023年第1期20-27,共8页Vacuum and Cryogenics

基　　金：国家自然科学基金(52066010);甘肃省科技计划项目(20YF8GA039);甘肃省高等学校创新基金项目(2021B-094)。

摘　　要：铝掺杂氧化锌(AZO)薄膜在红外波段具有高反射率的特性。设计了SiO_(2)/AZO/Al_(2)O_(3)/Glass/SiO_(2)光谱选择性反射膜。通过软件仿真和实验研究,探究了SiO_(2)、AZO、Al_(2)O_(3)薄膜的光学常数以及物理厚度对SiO_(2)/AZO/Al_(2)O_(3)/Glass/SiO_(2)薄膜光谱特性的影响,确定了光谱选择性反射薄膜的制备工艺参数。根据工艺制得了对可见光平均透射率接近90%、红外(2.5~20μm)平均反射率大于85%的光谱选择性反射膜,薄膜的辐射率为0.08~0.12。以表面镀有光谱选择性反射膜的玻璃作为线性菲涅尔式聚光系统中的二次聚光器窗口,设计了新型二次聚光器。光谱选择性反射玻璃有效阻挡了集热管的热辐射,使聚光器辐射热损失降低约66%。Aluminum-doped zinc oxide(AZO)thin films has the high reflectivity in the infrared band.the SiO_(2)/AZO/Al_(2)O_(3)/Glass/SiO_(2),a spectral selective reflection film was designed.Simulation and experimental research results shown that the optical constants and physical thickness of SiO_(2),AZO,Al_(2)O_(3) thin films have important effect on the spectral properties of SiO_(2)/AZO/Al_(2)O_(3)/Glass/SiO_(2) films,and the fabrication process parameters of spectral selective reflection films were determined.According to the above results,a spectral selective reflection film was fabricated.The spectral selective reflective film was prepared,whose average visible transmittance was close to 90%,average infrared reflectance was more than 85%,and emissivity was 0.8~0.12.A new secondary concentrator with a glass window coated by the spectral selective reflection film is designed.The radiant heat loss of concentrator is reduced by 66%,that attribute to the glass coated with the spectrally selective reflection film can effectively reduce the radiant heat loss of the secondary concentrator.

关 键 词：太阳能 光谱选择性反射膜 AZO薄膜 辐射热损失 二次聚光器 

分 类 号：TK519[动力工程及工程热物理—热能工程] O484.41[理学—固体物理]