一种非完全覆盖多镀层微圆板谐振器热弹性阻尼通用计算框架  

General theoretical framework for calculating the thermoelastic damping in circular microplate resonators partially covered with multi-coating

作　　者：杨龙飞 李普[2] 叶一舟 方昱斌 YANG Longfei;LI Pu;YE Yizhou;FANG Yubin(School of Intelligent Manufacturing,Nanjing University of Science and Technology,Nanjing 210094,China;School of Mechanical Engineering,Southeast University,Nanjing 211189,China;College of Optoelectronic Engineering,Chongqing University,Chongqing 400094,China)

机构地区：[1]南京理工大学智能制造学院,南京210094 [2]东南大学机械工程学院,南京211189 [3]重庆大学光电工程学院,重庆400094

出　　处：《振动与冲击》2023年第2期235-243,275,共10页Journal of Vibration and Shock

基　　金：国家自然科学基金(62104022);MEMS教育部重点实验室(2242020k30039);中国博士后科学基金(2021M691598)。

摘　　要：热弹性阻尼(thermoelastic damping, TED)是决定微机械谐振器品质因子上限的关键参数之一。该研究首次提出了一种计算具有多个非完全覆盖镀层微圆板谐振器TED的通用理论框架。该解析模型可退化到完全覆盖双层微圆板TED模型,数值方法同样验证了当前模型的有效性。同时提出可用工程设计领域快速计算的简单模型,并分析了该简单模型的适用范围。最后研究了具有2个非完全镀层微圆板TED频率谱特性,发现了频率谱的三Debye峰现象。Thermoelastic damping(TED)is one of the critical coefficients that determines the upper limit of the quality factor of micromechanical resonators.A general theoretical framework was presented for calculating the TED in circular microplate resonators partially covered with multiple coatings.The present model can be degenerated to that of fully covered bilayer cases,and the numerical method also verifies the effectiveness of the current model.At the same time,a simple model for rapid calculation in the engineering design was proposed,and the application scope of the simple model was discussed.Finally,the TED frequency spectra behaviors of microcircular plates with 2 coatings were studied,and three Debye peaks in the frequency spectra were found.

关 键 词：微机械谐振器 热弹性阻尼(TED) 品质因子 热弹性理论 

分 类 号：TH113[机械工程—机械设计及理论] O343[理学—固体力学]