高速MEMS开关长时间实时监测系统设计  

Design of high speed MEMS switch long time real-time monitoring system

作　　者：程亚昊 王志斌 王耀利 景宁[3] CHENG Yahao;WANG Zhibin;WANG Yaoli;JING Ning(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Center for Microsystem Intergration,North University of China,Taiyuan 030051,China;School of Information and Communication Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学微系统集成研究中心,山西太原030051 [3]中北大学信息与通信工程学院,山西太原030051

出　　处：《电子设计工程》2023年第2期16-19,24,共5页Electronic Design Engineering

基　　金：国家自然基金青年基金项目(62105302);山西省青年基金项目(201801D221211);山西省自然基金项目(201901D111145)。

摘　　要：为了监测射频MEMS开关的工作状态,设计了一种基于FPGA复原波形计数技术的长时间工作状态监测系统。该系统由驱动和检测两部分构成:对于驱动电压比较高的MEMS芯片设计了可调的高压驱动电路,电压可调范围在40_(Vpp)~110_(Vpp)之间连续变化;通过高压驱动控制射频MEMS器件的通断,将通过的射频信号调理采集并通过阈值判定开关通断的有效性。该系统达到了实时监测射频MEMS开关工作状态的目的,另一方面,在长时间连续工作条件下,监测系统的计数功能可实现对开关寿命的测试。In order to monitor the working state of RF MEMS switch,a long time working state monitoring system based on FPGA restoration waveform counting technology is designed.The system consists of two parts:driving and detecting.For MEMS chip with relatively high driving voltage,an adjustable high voltage driving circuit is designed.The adjustable voltage ranges from 40_(Vpp) to 110_(Vpp) continuously.The on-off of the RF MEMS device is controlled by the high voltage drive,and the passing RF signal is collected and adjusted to determine the effectiveness of the on-off switch through the threshold value.The system can monitor the working state of RF MEMS switch in real time.On the other hand,the counting function of the monitoring system can test the life of the switch under the condition of long continuous working time.

关 键 词：射频MEMS开关 高压偏置电路 寿命测试 FPGA BCD码 A/D 

分 类 号：TN0[电子电信—物理电子学] TM383.6[电气工程—电机]