微型PZT厚膜超声电机定子的制备及分析  

Fabrication and Analysis of Micro PZT Thick Film Ultrasonic Motor Stator

作　　者：宗浩然 王大志[1,2] 赵奎鹏 袁钰恒 梁世文 杨勇 Zong Haoran;Wang Dazhi;Zhao Kuipeng;Yuan Yuheng;Liang Shiwen;Yang Yong(School of Mechanical Engineering,Dalian University of Technology,Dalian,Liaoning 116024,China;Ningbo Research Institute,Dalian University of Technology,Ningbo,Zhejiang 315016,China;Ningbo Yongxin Optics Co.,Ltd.,Ningbo,Zhejiang 315048,China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024 [2]大连理工大学宁波研究院,浙江宁波315016 [3]宁波永新光学股份有限公司,浙江宁波315048

出　　处：《机电工程技术》2022年第12期14-17,共4页Mechanical & Electrical Engineering Technology

基　　金：国家自然科学基金面上项目(编号:51975104,62074138);大连理工大学宁波研究院项目。

摘　　要：基于电流体喷印工艺制备了微型PZT厚膜超声电机定子。搭建了电流体喷印实验平台,利用电流体喷印工艺,以锆钛酸铅(PZT)复合悬浮液为喷印材料,在钛合金弹性体上沉积了厚度为50μm的环形PZT厚膜并在700℃下进行高温退火结晶,利用磁控溅射技术在PZT厚膜上制备了厚度为50/200 nm的Ti/Pt分区上电极并进行极化,获得了外径为4.3 mm、厚度为0.6 mm的微型PZT厚膜超声电机定子。测试和分析了PZT厚膜和定子的性能,采用扫描电镜观察了PZT厚膜的截面和表面微观形貌,采用拉伸法分析了PZT厚膜与弹性体的结合力,采用激光多普勒测振仪对定子进行振动性能测试。实验结果表明,定子工作模态的谐振频率为82.3 kHz,在10 V激励电压下,表面测试点振幅为212 nm,并且振幅与激励电压幅值呈线性正相关,定子具有良好的振幅响应控制性。Micro PZT thick film ultrasonic motor stator was fabricated based on electrohydrodynamic jet printing process.Set up an experimental platform for electrohydrodynamic jet printing.Using the electrohydrodynamic jet printing process,the Lead zirconate titanate(PZT)composite suspension was used as the electrohydrodynamic jet printing material to deposit a thick annular PZT film with a thickness of50μm on the titanium alloy elastomer and annealed at 700°C for crystallization.Using magnetron sputtering technology,a Ti/Pt partitioned upper electrode with a thickness of 50/200 nm was fabricated on the PZT thick film and polarized to obtain a miniature PZT thick film ultrasonic motor stator with the outer diameter of 4.3 mm and the thickness of 0.6 mm.The performance of PZT thick film and stator was tested and analyzed.The cross-section and surface morphology of PZT thick films were observed by scanning electron microscope.The bonding force between PZT thick film and elastomer was analyzed by tensile method.The vibration performance of the stator was tested with a laser Doppler vibrometer.The experimental results show that the resonant frequency of the stator working mode is 82.3 kHz,the amplitude of the test point on the stator surface is 212 nm under the excitation voltage of 10 V,and the amplitude is linearly positively correlated with the excitation voltage amplitude,and it has good amplitude response controllability.

关 键 词：超声电机定子 PZT厚膜 电流体喷印 

分 类 号：TM359.9[电气工程—电机]