热声转换的声表面波电压传感机制  

Surface acoustic wave voltage sensing mechanism based on thermoacoustic conversion

作　　者：崔柏乐 王文[1,2] 金晶 程利娜 薛蓄峰[1] 梁勇 CUI Baile;WANG Wen;JIN Jing;CHENG Lina;XUE Xufeng;LIANG Yong(Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190;University of Chinese Academy of Sciences,Beijing 100049)

机构地区：[1]中国科学院声学研究所,北京100190 [2]中国科学院大学,北京100049

出　　处：《声学学报》2023年第1期112-118,共7页Acta Acustica

基　　金：国家自然科学基金项目(U1837209,12204510);国家重点研发计划项目(2020YFB1506205)资助。

摘　　要：提出了一种基于热声转换的高灵敏声表面波(SAW)电压传感机制并开展实验验证。从传热角度以及微扰理论出发建立了基于热声转换机制的SAW电压传感理论模型,探索了结构参数以及环境因素对SAW电压传感器灵敏度的影响规律。为了验证理论模型,在Y切石英基底上同芯片集成设计MEMS微型加热器与200 MHz声表面波器件以制备SAW电压传感器件,并搭建电压测试平台对传感器件开展性能测试。实验结果表明所制备的SAW传感器件电压与频率响应之间具有二次线性关系且在室温(20℃)下具有与理论相近的电压灵敏度(22.4 kHz/V),此外实验获得的环境温度对电压灵敏度的影响规律与理论相符。基于热声转换机制的SAW电压传感器能够显著的提高电压检测灵敏度。A highly sensitive SAW voltage sensing mechanism based on thermoacoustic conversion is proposed and experimentally verified.Based on heat transfer and perturbation theory,the theoretical model of SAW voltage sensing based on thermoacoustic conversion mechanism is established,and the influence of structural parameters and environmental factors on the sensitivity of SAW voltage sensor is explored.In order to verify the theoretical model,MEMS micro heater and 200 MHz SAW device are integrated with the chip on Y-cut quartz substrate to prepare SAW voltage sensor components,and voltage test platform is built to test the performance of sensor components.The experimental results show that there is a quadratic linear relationship between the voltage and frequency response of the prepared SAW sensor,and the voltage sensitivity(22.4 kHz/V) at room temperature(20℃) is close to that of the theory.In addition,the influence rule of ambient temperature on the voltage sensitivity obtained by the experiment is consistent with the theory.The SAW voltage sensor based on the thermoacoustic conversion mechanism can significantly improve the sensitivity of voltage detection.

关 键 词：电压传感器 声表面波器件 SAW传感器 传感器灵敏度 电压灵敏度 传感器件 电压测试 微扰理论 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]