基底上覆分层薄膜超声Scholte波特性与薄膜定征  

Ultrasonic Scholte wave dispersive properties and parameters characterization of films in water immersion layered thin film-substrate structure

作　　者：宋博文 马琦 胡文祥[1] 钱梦騄[1] SONG Bowen;MA Qi;HU Wenxiang;QIAN Menglu(Institute of Acoustics,Tongji University,Shanghai 200092;Edan Instrument,Shenzhen 518122)

机构地区：[1]同济大学声学研究所,上海200092 [2]理邦精密仪器股份有限公司,深圳518122

出　　处：《声学学报》2023年第1期128-137,共10页Acta Acustica

基　　金：国家自然科学基金项目(11774264)资助。

摘　　要：分层薄膜-基底结构广泛应用于微电子器件等诸多领域,但薄膜材料参数超声测量尤其是横波速度的定征是一个困难的问题。本文对液固界面Scholte界面波的频散特性和脉冲激励的声压响应进行了理论分析。结果表明,液固界面Scholte波频散与分层膜-基底结构的速度分布密切相关。薄膜材料各层的厚度和横波速度对界面波频散特性有显著影响。基于Scholte界面波的频散特性,提出了一种多层膜的多参数反演定征方法。首先针对理论信号进行薄膜参数反演,验证了该方法的可行性。后续对不同类型的多层膜材料样品进行了液固界面波激发与采集实验,实验信号的薄膜参数反演结果进一步验证了该方法的可行性和有效性。The structure of multilayer films deposited on a substrate is widely used in many fields,such as microelectronic devices,but the ultrasonic measurement of the film material parameters,especially the shear velocity,is a difficult problem.The theoretical analysis for dispersion properties of liquid-solid interface Scholte wave and acoustic pressure response generated by a pulse excitation shows that the Scholte interface wave dispersion is associated significantly with the velocity distribution of multilayer films.The thickness and shear wave velocity of each layer of thin film materials significantly affect the interface wave dispersive characteristics.A multi-parameter inversion method for layered films is proposed based on the dispersive properties of Scholte wave at the interface between liquid and layered film-substrate structure.The proposed method is first processed and verified by theoretical synthetic signals,and further experiment is conducted to excite and acquire liquid-solid interface waves for different types of multilayer film material samples.The inversion results of layered film parameters for experimental signals confirm the feasibility,effectiveness and convenience of this method.

关 键 词：薄膜材料 材料样品 超声测量 液固界面 频散特性 横波速度 界面波 微电子器件 

分 类 号：TB383.2[一般工业技术—材料科学与工程]