MEMS激光雷达综述  

Review of MEMS LiDAR

作　　者：乔大勇[1,2] 苑伟政[1,2] 任勇 QIAO Dayong;YUAN Weizheng;REN Yong(Key Laboratory of Micro/Nano Systems for Aerospace,Ministry of Education,Northwestern Polytechnical University,Xi’an 710072,China;Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,Northwestern Polytechnical University,Xi’an 710072,China;Xi’an Zhisensor Technology LTD,Xi’an 710075,China)

机构地区：[1]西北工业大学空天微纳系统教育部重点实验室,陕西西安710072 [2]西北工业大学陕西省微/纳米系统重点实验室,陕西西安710072 [3]西安知微传感技术有限公司,陕西西安710075

出　　处：《微电子学与计算机》2023年第1期41-49,共9页Microelectronics & Computer

基　　金：国家自然科学基金(U21B2035)。

摘　　要：近年人工智能飞速发展,自动驾驶、智能驾驶已进入产业元年.激光雷达技术作为最为重要的自动驾驶视觉感知设备,正在进行不断的发展与迭代.本文旨在介绍激光雷达及其国内外研究现状.文中着重介绍了MEMS固态激光雷达的核心部件MEMS微振镜的技术参数及指标,如视场角、光学孔径、扫描速度、扫描频率、MEMS微振镜尺寸以及品质因数.最终汇总了车载激光雷达的应用现状,展望车载激光雷达的未来与发展.With the rapid progress of Al,autonomous driving and intelligent driving have stepped the first year of the industry.As the most important sensor in automatic driving,LiDAR technology is developing and iterating continuously.This paper introduces LiDAR,the research status home and abroad,and the key points and future of MEMS solid-state LiDAR.This paper introduces the technical parameters and indexes of MEMS mirror,the core component of MEMS LiDAR,such as field of view angle,optical aperture,scanning speed,scanning frequency,MEMS mirror size and quality factor(FoM).Finally,the application status of vehicle-mounted LiDAR is described,and the future and development of vehicle-mounted MEMS LiDAR are prospected.

关 键 词：激光雷达 MEMS激光雷达 MEMS微振镜 

分 类 号：TN958.98[电子电信—信号与信息处理]