GeSn红外光探测器性能参数模拟研究  

Research on performance parameter of GeSn infrared photodetectors

作　　者：王晓利 李婉 舒斌[2] 胡辉勇[2] WANG Xiao-li;LI Wan;SHU Bin;HU Hui-yong(School of Electronic and Electrical Engineering,Baoji University of Arts and Sciences,Baoji 721016,Shaanxi,China;School of Microelectronics,Xidian University,Xi'an 710071,Shaanxi,China)

机构地区：[1]宝鸡文理学院电子电气工程学院,陕西宝鸡721016 [2]西安电子科技大学微电子学院,陕西西安710071

出　　处：《宝鸡文理学院学报（自然科学版）》2022年第4期63-67,共5页Journal of Baoji University of Arts and Sciences(Natural Science Edition)

基　　金：宝鸡市科技局工业攻关项目(2017JH2-05)。

摘　　要：目的 研究通过调整Sn组分提高GeSn红外探测器的性能,为其进一步发展和实现在光纤通信中的应用提供科学依据和设计思路。方法 基于GeSn合金设计并优化了光探测器,以期获得高的响应度和宽的响应波段。经过Silvaco软件仿真,建立了Ge基波导型光探测器的初始模型,通过控制变量不断改变特征参数来优化器件,引入应变对材料进行能带改性。结果与结论通过改变GeSn合金中Sn的组分,GeSn红外光探测器的最大截止波长可达到2.25μm,同时理清了材料中的应变对探测器响应度、响应范围等性能的作用机制,获得了高响应度和响应范围的GeSn光电探测器件。Purposes-To improve the performance of GeSn infrared photodetectors by adjusting Sn components, and provide scientific basis and design ideas for the further development of GeSn infrared photodetectors and their application in fiber-optic communication. Methods-The photodetector is designed and optimize based on GeSn alloy in order to obtain both high responsiveness and response bandwidth. Silvaco software is used for experimental simulation, the initial model of Ge-based waveguide photodetector is established, and the device is optimized by continuously changing the characteristic parameter when the variables are controlled. In addition, strain is introduced to modify the material’s energy band. Results and Conclusions-After changing the composition of Sn in GeSn alloy, the maximum cut-off wavelength of GeSn infrared photodetector can reach 2.25 μm. Meanwhile, clarified are the effect of strain in the materials on the performances like photodetector’s responsiveness and response range, and obtained is the GeSn photodetectors with high responsiveness and large response range.

关 键 词：光电探测器 GeSn合金 光响应度 3 dB带宽 

分 类 号：TN215[电子电信—物理电子学]