基于UV-LIGA工艺的W波段波导带通滤波器  

W-Band Waveguide Band-Pass Filter Based on UV-LIGA Technology

作　　者：申欣欣 陆畅 张斌珍 段俊萍 Shen Xinxin;Lu Chang;Zhang Binzhen;Duan Junping(Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2022年第11期1162-1168,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(5217555);国家自然科学基金创新群体资助项目(51821003);山西省重点研发项目(国际合作)(201803D421043);山西省“1331工程”重点学科建设资助项目;山西省基础研究计划资助项目(20210302123074);山西省高等学校中青年拔尖创新人才资助项目。

摘　　要：研制了一种可应用于6G通信系统的W波段腔体带通滤波器。与传统的直接耦合带通滤波器相比,该滤波器通过引入两个基于TE_(301)模式的单线态结构,分别在通带两端产生两个传输零点,从而增强了滤波器阻带抑制性能。通过调整谐振腔尺寸,可以实现对传输零点的独立控制。利用电磁仿真软件对滤波器材料对插入损耗及时延的影响进行了仿真分析。该波导带通滤波器采用UV-LIGA工艺进行加工制作并测试。测试结果表明,该滤波器的中心频率为94 GHz,-3 dB分数带宽为25.8%,插入损耗小于2 dB,阻带抑制最大可以达到-65 dB,验证了滤波器设计与制备方法的可行性。A W-band cavity band-pass filter for 6 G communication system was developed.Compared with the traditional direct-coupling band-pass filter,the filter generates two transmission zeros at both ends of the passband by introducing two singlet structures based on TE_(301)mode,thereby enhancing the stop-band suppression.The transmission zero can be controlled indepen-dently by adjusting the size of the resonant cavity.The influences of the filter material on the insertion loss and delay were simulated and analyzed with the electromagnetic simulation software.The waveguide band-pass filter was fabricated with UV-LIGA technology and was tested.The test results show that the center frequency of the filter is 94 GHz,the-3 dB fractional bandwidth is 25.8%,the insertion loss is less than 2 dB,and the maximum stopband suppression can reach-65 dB,which verifies the feasibility of the filter design and preparation method.

关 键 词：波导带通滤波器 UV-LIGA 94 GHz 单线态 传输零点 

分 类 号：TN713.1[电子电信—电路与系统]