面向倏逝波传感的微槽式谐振腔设计及制备  

Design and Preparation of Microgroove Resonant Cavity for Evanescent Wave Sensing

作　　者：祝敏 崔建功[1] 余亚鑫 楚晓霞 张国军[1] 杨玉华[1] 王任鑫[1] 何常德[1] 张文栋[1] Zhu Min;Cui Jiangong;Yu Yaxin;Chu Xiaoxia;Zhang Guojun;Yang Yuhua;Wang Renxin;He Changde;Zhang Wendong(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2022年第11期1205-1210,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金面上项目(52175553);国家重点研发计划资助项目(2019YFC0119800);山西省基础研究计划资助项目(202103021224203);山西省“1331工程”重点学科建设计划资助项目。

摘　　要：针对二氧化硅波导腔在倏逝波传感领域的应用,研制了一种微槽式二氧化硅光波导微环谐振腔结构。基于耦合模理论,分析了微槽式二氧化硅光波导微环谐振腔的传输特性和特征参量,优化了结构参数。采用等离子体增强化学气相沉积(PECVD)和电感耦合等离子体(ICP)刻蚀技术进行了器件的加工。搭建了测试系统并对制备得到的谐振腔进行品质因数(Q)测试以及声传感测试。测试结果表明,Q值可达1.69×10^(6),在1 kHz、5 Pa的声压下,信噪比可达22.975 dB。相较于传统的掩埋式微环谐振腔结构,此设计的微槽式微环谐振腔倏逝场效应更强,在倏逝波传感领域有着更好的应用潜力。For the application of silicon dioxide waveguide cavity in evanescent wave sensing field,a microgroove silicon dioxide optical waveguide microring resonant cavity structure was developed.Based on the coupled mode theory,the transmission characteristics and characteristic parameters of the microgroove silicon dioxide optical waveguide microring resonant cavity were analyzed,and the structural parameters were optimized.Then,plasma enhanced chemical vapor deposition(PECVD)and inductively coupled plasma(ICP)etching technology were used to process the device.The test system was built,and the quality factor(Q)test and acoustic sen-sing test of the prepared resonant cavity were carried out.The test results show that the Q value can reach 1.69×10^(6),and the signal to noise ratio can reach 22.975 dB at the sound pressure of 1 kHz and 5 Pa.Compared with the traditional buried microring resonant cavity structure,the designed microgroove microring resonant cavity has stronger evanescent field effect and better application potential in the field of evanescent wave sensing.

关 键 词：微环谐振腔 光波导 倏逝场效应 微纳加工 品质因数 

分 类 号：TN256[电子电信—物理电子学]