砷化镓单晶线性孪晶长度判断方法研究  

Study on the length judgment method of GaAs single crystal linear twin crystal

作　　者：王金灵 刘火阳 WANG Jinling;LIU Huoyang(Guangdong Pilot Microelectronics Technology Co.,LTD.Qingyuan,Guangdong 511517,China;National Engineering and Technology Research Center for Dispersed Metals,Qingyuan,Guangdong 511517,China;Guangdong Pioneer Thin Material Co.,LTD.,Qingyuan,Guangdong 511517,China)

机构地区：[1]广东先导微电子科技有限公司,广东清远511517 [2]国家稀散金属工程技术研究中心,广东清远511517 [3]广东先导稀材股份有限公司,广东清远511517

出　　处：《信息记录材料》2022年第12期36-38,共3页Information Recording Materials

摘　　要：本文研究线性孪晶在晶体中的生长存在规律性,根据几何关系的换算则可以计算出M-Twin需要切割的砷化镓单晶长度。实验验证利用理论公式计算晶棒的M-Twin长度与实际M-Twin切除长度接近,证明该计算方法可以判断砷化镓线性孪晶的长度,可以减少因人为误判而造成的浪费。In this paper,the growth regularity of linear twins in crystals was studied,and the length of GaAs single crystal to be cut by M-Twin could be calculated according to the conversion of geometric relations.The experimental results show that the M-Twin length calculated by the theoretical formula is close to the actual M-Twin excised length,which proves that the calculation method can judge the length of GaAs linear twin and reduce the waste caused by human misjudgment.

关 键 词：线性孪晶 砷化镓单晶 长度判断 

分 类 号：TN6[电子电信—电路与系统]