水基超声辅助纳秒激光微孔加工  

Nanosecond Laser Micro-hole Machining Assisted by Water Based Ultrasound

作　　者：刘浩存 蔡燕 谢奕 张书平 孙兵涛[1] 秦渊[2] 朱德华[1] Liu Haocun;Cai Yan;Xie Yi;Zhang Shuping;Sun Bingtao;Qin Yuan;Zhu Dehua(College of Mechanical and Electrical Engineering,Wenzhou University,Wenzhou,Zhejiang 325035,China;College of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing,Jiangsu 210094,China)

机构地区：[1]温州大学机电工程学院,浙江温州325035 [2]南京理工大学材料科学与工程学院,江苏南京210094

出　　处：《应用激光》2022年第11期64-70,共7页Applied Laser

基　　金：NSFC-浙江两化融合联合基金重点项目(U1609209);温州市优秀重点实验室基础性科研项目(H2020004)。

摘　　要：纳秒激光所制微孔在工业领域中具有广泛的应用。然而,孔壁重铸层的存在降低了微孔的使用性能和寿命。如何减小重铸层厚度并提高孔壁光洁度,有待进一步深入研究。以镍基高温合金为研究对象,通过对比有无超声辅助纳秒激光制孔,分析了水基超声辅助对微孔几何尺寸及孔壁粗糙度、重铸层的影响。结果表明,对于纳秒激光所制通孔,超声辅助可使微孔的出口孔圆度误差减小,锥度增加,同时降低孔壁粗糙度,并且可以减少孔壁重铸层,提高微孔质量。然而在试验条件下,水基超声辅助对所制盲孔的几何尺寸和孔壁形貌的影响不大。由此可见,在超声辅助下,纳秒激光制孔的质量可以得到一定程度的改善。Nanosecond laser drilling micro-holes are widely used in industry.However,the existence of recasting layer reduces the service performance and life of micropores.How to reduce recasting layer thickness and improve hole wall finish remains to be further studied.In this paper,the Ni-base superalloy is taken as the research object.By comparing with the ultrasonic assisted nanosecond laser drilling,the influence of ultrasonic assisted water on the micropore geometry,the roughness of the hole wall and the recasting layer is analyzed.The results show that for the through holes made by nanosecond laser,the ultrasonic assisted method can reduce the roundness error of the outlet hole,increase the taper,reduce the roughness of the hole wall,reduce the recasting layer of the hole wall,and improve the quality of the micro-hole.However,under experimental conditions,water-based ultrasonic assistance has little influence on the geometrical size and hole wall morphology of the blind hole.It can be seen that the quality of nanosecond laser hole making can be improved to a certain extent with the help of ultrasound.

关 键 词：超声辅助 纳秒激光 激光制孔 镍基625 

分 类 号：TN249[电子电信—物理电子学]