成像物镜集成公差分配与定心装调技术研究  

Research on Integrated Tolerance Allocation and Centering Adjustment Technology of Imaging Objective Lens

作　　者：李星辰 武震 高爱梅[1] 申淙 张乾[1] LI Xingchen;WU Zhen;GAO Aimei;SHEN Cong;ZHANG Qian(The 45^(th) Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2022年第6期17-20,40,共5页Equipment for Electronic Products Manufacturing

摘　　要：针对高分辨率对准成像镜头对装配误差的严苛要求,提出了一种成像物镜装配公差分配和定心装调技术以满足光学系统集成要求。以分辨率为2μm的成像物镜为例,分析了影响光学镜头成像质量的误差来源,进行了公差仿真分析和加工公差分配。集成测试过程中以中心偏差测量仪为辅助工具,进行了镜组光轴精确校准,其光轴偏心小于20μm,光轴倾斜小于144″。最后将集成结果数据代入光学仿真软件进行像质分析并实测图像结果进行对比分析。结果表明:运用该方法,各镜片间的光轴偏心误差和倾斜误差能够匹配公差分配要求,成像效果满足镜头像质需求。A kind of imaging objective lens assembly tolerance distribution and a centering technique for the integration requirements of optical systems are proposed for the high score discrimination rate,which is aimed at the strict requirements of the imaging objective lens for the assembly error.In this paper,the error source of the optical lens imaging quality is analyzed by the resolution of 2μm,and the tolerance simulation analysis and machining tolerance distribution are carried out. In the process of integrated testing,the center deviation measuring instrument is used for the auxiliary aid,and the optical axis is calibrated accurately,and the shift-error of optical axis is less than 20μm. The tilt-error of optical axis is less than 144″. Finally,the integration results are analyzed by the analysis of the data and the results of the measured image. The results show that the optical axis shift-error and the tilt-error can match the tolerance distribution requirements,and the imaging effect satisfies the requirements of the lens’ imaging quality.

关 键 词：成像物镜 公差分配 定心装调 像质分析 

分 类 号：TN206[电子电信—物理电子学]