低噪声原子力显微镜系统设计  

Design of Low Noise Atomic Force Microscope System

作　　者：王硕 梁文峰 杨铁[2,3] 于鹏 Wang Shuo;Liang Wenfeng;Yang Tie;Yu Peng(School of Mechanical Engineering,Shenyang Jianzhu University,Shenyang 110168,China;State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China;Institute of Robotics and Intelligent Manufacturing Innovation,Chinese Academy of Sciences,Shenyang 110169,China)

机构地区：[1]沈阳建筑大学机械工程学院,沈阳110168 [2]中国科学院沈阳自动化研究所机器人学国家重点实验室,沈阳110016 [3]中国科学院机器人与智能制造创新研究院,沈阳110169

出　　处：《微纳电子技术》2022年第12期1360-1367,1387,共9页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61927805,61925307)。

摘　　要：原子力显微镜(AFM)以其极高的分辨率成为纳米技术研究中最重要的扫描成像和检测分析仪器。AFM系统探针与样品间机械回路长度是影响系统性能的关键因素,回路越长,系统越容易受到外界噪声干扰,导致探针与样品间的振动越大,振动会降低系统的成像质量和测量分辨率。因此,为了提升AFM系统抗干扰性能,对传统长机械回路系统进行优化改进,提出一种具有超短机械回路的AFM系统设计方法,通过提升系统刚度,降低测量时的系统噪声。对AFM扫描头进行有限元仿真分析,验证设计的合理性;在仿真分析基础上搭建了实物AFM系统;最后在实物系统上测试了长、短机械回路系统在相同条件下的整体噪声水平,并对短机械回路AFM系统进行标准栅格样品扫描成像实验。实验结果表明:在0~800 Hz内,长机械回路AFM系统有明显的机械噪声,而短机械回路能够有效地降低系统机械噪声,接触模式下系统的均方根粗糙度为26 pm,表明该系统具有极低的噪声水平。并且短机械回路AFM系统能够对标准化的栅格样品实现25μm×25μm高精度扫描成像。该方法能够降低系统噪声水平,提升了系统亚纳米级测量精度,推动AFM系统向更高精度测量方向发展。Due to high resolution,atomic force microscope(AFM)has become the most important scanning imaging,detection and analysis instrument in nanotechnology research.The length of the mechanical loop between the probe and sample of the AFM system is the key factor affec-ting the system performance.The longer the loop,the more vulnerable the system is to external noise interference,resulting in greater vibration between the probe and sample,which will reduce the imaging quality and measurement resolution of the system.Therefore,for the anti-interfe-rence performance improvement of the AFM system,the traditional long mechanical loop system was optimized and improved,and a design method of the AFM system with ultra-short mechanical loop was proposed.The system noise during measurement was reduced by improving the system stiffness.The finite element simulation analysis of AFM scanning head was carried out to verify the rationality of the design.Then the actual AFM system was built on the basis of simulation analysis.Finally,the overall noise level of the long and short mechanical loop AFM systems under the same conditions were tested on the physical system,and the standard grid sample scanning imaging experiment was carried out on the short mechanical loop AFM system.The experimental results show that the long mechanical loop AFM system has obvious mechanical noise in the range of 0-800 Hz,while the short mechanical loop can effectively reduce the mechanical noise of the system,and the root mean square roughness of the system in contact mode is 26 pm,indicating that the system has very low noise level.In addition,the short mechanical loop AFM system can achieve high-precision scanning imaging of 25μm×25μm for standardized grid samples.The method can reduce the noise level of the system,improve the sub nano measurement accuracy of the system,and promote the development of the AFM system to higher accuracy measurement.

关 键 词：原子力显微镜(AFM) 扫描成像 低噪声 机械回路 光学测量系统 

分 类 号：TH742[机械工程—光学工程]