四甲基氢氧化铵溶液中阴离子含量检测方法  

Determination of anions in tetramethylammonium hydroxide solution

作　　者：高一鸣 郝萍[1] 李春华[1] Gao Yiming;Hao Ping;Li Chunhua(Shanghai Institute of Measurement and Testing Technology)

机构地区：[1]上海市计量测试技术研究院

出　　处：《上海计量测试》2022年第5期17-19,共3页Shanghai Measurement and Testing

摘　　要：提出了一种对低浓度四甲基氢氧化铵溶液中氟离子、氯离子、溴离子、亚硝酸根离子、硝酸根离子、硫酸根离子和磷酸根离子含量的检测方法。TMAH溶液稀释质量浓度为2.38%,经在线浓缩处理,离子色谱仪检测,该方法六种阴离子的检出限21~109 ng/L,定量限70~360 ng/L,线性相关系数>0.999,5.0μg/L加标回收率98%~128%。该方法对TMAH溶液中常见的六种阴离子组分检测结果良好,可满足半导体及面板行业用TMAH溶液的检测需求。An analytical method for testing anions of F-,Cl-,NO3-,Br-,SO42-,PO43-in low concentration of tetramethylammonium hydroxide has been established.2.38%TMAH solution can be injected into the ion chromatography.The LOD of six anions was 21~109 ng/L,LOQ was 70~360 ng/L.The linear correlation coefficient of the calibration curve was≥0.999,The recovery rate of 5.0μg/L was 98%~128%.This method could meet the detection requirements of TMAH solution used in the semiconductor and panel industries.

关 键 词：四甲基氢氧化铵 离子色谱 无机阴离子 

分 类 号：TQ113.7[化学工程—无机化工] O657.7[理学—分析化学]