用于微电池的超高功率密度铁氧硫化物薄膜  

Ultrahigh-power iron oxysulfide thin films for microbatteries

作　　者：柯秉渊 王星辉 程受麟 李王阳 邓人铭 张聪聪 林杰 谢清水 彭栋梁 Bingyuan Ke;Xinghui Wang;Shoulin Cheng;Wangyang Li;Renming Deng;Congcong Zhang;Jie Lin;Qingshui Xie;Dong-Liang Peng(College of Physics and Information Engineering,Institute of Micro-Nano Devices and Solar Cells,Fuzhou University,Fuzhou 350108,China;Fujian Science&Technology Innovation Laboratory for Optoelectronic Information of China,Fuzhou 350108,China;Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering,Changzhou 213000,China;State Key Laboratory for Physical Chemistry of Solid Surfaces,Fujian Key Laboratory of Materials Genome,Collaborative Innovation Center of Chemistry for Energy Materials,College of Materials,Xiamen University,Xiamen 361005,China)

机构地区：[1]College of Physics and Information Engineering,Institute of Micro-Nano Devices and Solar Cells,Fuzhou University,Fuzhou 350108,China [2]Fujian Science&Technology Innovation Laboratory for Optoelectronic Information of China,Fuzhou 350108,China [3]Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering,Changzhou 213000,China [4]State Key Laboratory for Physical Chemistry of Solid Surfaces,Fujian Key Laboratory of Materials Genome,Collaborative Innovation Center of Chemistry for Energy Materials,College of Materials,Xiamen University,Xiamen 361005,China

出　　处：《Science China Materials》2023年第1期118-126,共9页中国科学（材料科学（英文版）

基　　金：supported by the Award Program for Fujian Minjiang Scholar Professorship,the National Natural Science Foundation of China(11704071 and 51871188);the Excellent Youth Foundation of Fujian Scientific Committee(2019J06008);Fujian Science&Technology Innovation Laboratory for Optoelectronic Information of China(2021ZR146);Fujian Provincial Department of Industry and Information Technology(82318075)。

摘　　要：作为微电池的核心指标之一,面积功率密度决定了微电池与应用于物联网的微电子器件集成时所需的面积.目前,由于微电子器件尺寸有限,微电池的实际应用受到低面积功率密度的限制.本文研究发现,经过原位等离子体预处理衬底后,溅射的铁氧硫化物薄膜(FeOxSy)具备超高功率特性.这种原位等离子体预处理可作为一种通用的界面优化策略来抑制长循环过程中的机械衰变.该正极薄膜展现出极高的功率密度和稳定的循环性能,这是由其高度的结构完整性(强大的界面粘附性和应力释放的岛)、完美的电化学可逆性以及近表面电荷交换(赝电容锂存储机制)的协同作用导致的.预处理的FeOxSy薄膜可以输出高达14.6 mW cm-2的功率密度和291μW h cm^(-2)μm^(-1)的体积能量密度.制备得到的正极薄膜的功率密度优于已报道的具有相当面积容量的溅射薄膜.本工作提出了一种简单且高效的预处理方法来制备具有超高功率密度且稳定的微电池薄膜电极.Areal power density is one of the core indicators determining how large areas a microbattery need to occupy when integrated directly with microelectronic devices for the Internet of Things.Unfortunately,the low power density of microbatteries hinders their applications,because microelectronic devices only provide finite areas for integration.Herein,we show that sputtered iron oxysulfide(FeOxSy)thin films subjected to in situ plasma pretreatment display ultrahigh power density.This in situ plasma pretreatment can be regarded as a universal interface optimization strategy for suppressing mechanical degradation upon extended cycling.The synergistic effects of high structural integrity(robust interfacial adhesiveness and stress-relieving islands),perfect electrochemical reversibility,and near-surface charge exchanges(pseudocapacitive lithium storage mechanism)result in extremely high power density and stable cycling performance.The pretreated FeOxSythin films can output an areal power density as high as 14.6 mW cm-2and a considerable volumetric energy density of 291μWh cm^(-2)μm^(-1).Such a highpower density constitutes a new state-of-the-art level for sputtered thin-film materials with comparative areal capacity.This work provides an efficient and simple pretreatment method for achieving ultrahigh-power and stable thin-film electrodes for microbatteries.

关 键 词：微电子器件 高功率密度 微电池 循环过程 界面优化 超高功率 薄膜电极 应力释放 

分 类 号：TB383.2[一般工业技术—材料科学与工程]