超精密加工误差补偿技术研究综述  

Research Review of Error Compensation Technology for Ultra-precision Machining

作　　者：陈启迪 胡小龙[2] 吝敏 孙晓霞 张涛[1] 周志雄 CHEN Qidi;HU Xiaolong;LIN Min;SUN Xiaoxia;ZHANG Tao;ZHOU Zhixiong(China North Vehicle Research Institute,Beijing,100072;College of Mechanical and Vehicle Engineering,Hunan University,Changsha,410082)

机构地区：[1]中国北方车辆研究所,北京100072 [2]湖南大学机械与运载工程学院,长沙410082

出　　处：《中国机械工程》2023年第3期253-268,共16页China Mechanical Engineering

基　　金：国家自然科学基金(51375156)。

摘　　要：超精密加工技术是高端制造领域的一项关键技术,当前超精密加工已进入纳米尺度,掌握超精密加工误差控制关键技术、保障并提高数控机床的加工精度,已经成为提高加工制造水平的研究热点。系统总结了超精密加工误差补偿技术研究现状及发展趋势,重点介绍了对超精密加工影响最大的几何误差、力诱导误差、热诱导误差及其补偿方法。在此基础上,深入探讨了超精密加工在几何误差分离,切削力、热诱导误差测量与补偿等方面存在的一系列问题,进一步指出超精密加工误差补偿技术还应关注其向高效、高精,通用化,模块化,智能化及柔性化的发展方向。Ultra-precision machining technology was a key technology in high-end manufacturing fields.At present,ultra-precision machining has entered the nano scale.Mastering the key technology of ultra-precision machining error control,ensuring and improving the machining accuracy of CNC machine tools,become a hot research point to improve the machining and manufacturing levels.This paper systematically summarized the research status and development trend of ultra-precision machining error compensation technology,and focused on the geometric errors,force induced errors,thermal induced errors and their compensation methods,which had the greatest impact on ultra-precision machining.Then,a series of problems of ultra-precision machining in geometric error separation,cutting force,thermal induced error measurement and compensation were deeply discussed,and it is further pointed out that the ultra-precision machining error compensation technology should also pay attention to the development direction of high efficiency,high precision,generalization,modularization,intelligence and flexibility.

关 键 词：超精密加工 误差补偿 研究现状 发展趋势 

分 类 号：TH16[机械工程—机械制造及自动化]