基于ISOMAP-DE-SVM的Cz单晶硅等径阶段掉苞预测  

Broken Edge Prediction in the Equal-Diameter Growth Process of Cz Single Crystal Silicon Based on ISOMAP-DE-SVM

作　　者：侯少华 张宏帅[1] 姜宝柱 朱宾宾 田增国[2] HOU Shaohua;ZHANG Hongshuai;JIANG Baozhu;ZHU Binbin;TIAN Zengguo(School of Mechanical and Power Engineering,Zhengzhou University,Zhengzhou 450001,China;School of Physics(Microelectronics),Zhengzhou Univerity,Zhengzhou 450001,China;MCL Electronic Materials Co.,Ltd.,Luoyang 471000,China)

机构地区：[1]郑州大学机械与动力工程学院,郑州450001 [2]郑州大学物理(微电子)学院,郑州450001 [3]麦斯克电子材料股份有限公司,洛阳471000

出　　处：《人工晶体学报》2023年第1期25-33,55,共10页Journal of Synthetic Crystals

基　　金：河南省先进制造业发展专项资金(2020)。

摘　　要：针对目测法无法及时发现直拉单晶硅在等径生长阶段发生的掉苞问题,本文提出一种基于ISOMAP-DE-SVM的掉苞预测模型,可以在掉苞现象发生之前发出警告。首先剔除方差较小的参数,采用斯皮尔曼相关系数法剔除冗余参数,采用最大互信息法检验剩余参数的非线性相关性;然后将关键参数的均值和标准差作为等度量映射和多维放缩的输入,得到两份样本数据;最后将这两份样本数据分别输入到经过差分算法、遗传算法优化的支持向量机预测模型,得到4份预测结果。预测结果表明:基于ISOMAP-DE-SVM的预测模型具有收敛速度快、准确度高的特点,平均预测准确率可以达到96%;同时,所使用的方法揭示了单晶硅等径阶段的数据具有非线性特点。通过实际应用验证表明模型具有一定的工程实用价值。Due to the failure of visual inspection to detect the phenomenon of broken edge during the equal-diameter growth process of single crystal silicon,a method based on the ISOMAP-DE-SVM was proposed to give early-warning before the phenomenon of broken edge.Firstly,the parameters with small variance were excluded,redundant parameters were rejected by the spearman correlation coefficient,the nonlinear correlation of remaining parameters was tested by maximal information cofficient.Then,the mean and standard deviation of the key parameters were input into isometric mapping and multiple dimensional scaling,and two samples were obtained.Finally,two samples were input into the support vector machine prediction model optimized by difference algorithm and genetic algorithm respectively,and four results were obtained.The prediction results show that the prediction model based on ISOMAP-DE-SVM can effectively predict the phenomenon of broken edge of single crystal silicon,the prediction model has the characteristics of fast convergence speed and high accuracy,and the average prediction rate can reach 96%.Meanwhile,the method reveals that the data in the equal-diameter growth process of single crystal silicon has nonlinear characteristics.In the practical application verification,it is shown that the model has certain engineering practical value.

关 键 词：直拉法 单晶硅 等径生长 支持向量机 等度量映射 掉苞 预测 

分 类 号：O78[理学—晶体学] TN304.1[电子电信—物理电子学]