高频响MEMS石墨烯压力传感器设计  

Design of High Frequency MEMS Graphene Pressure Sensor

作　　者：郑士瑜 侯文[2,3] 王俊强 范宏斌 吴天金 李孟委 ZHENG Shi-yu;HOU Wen;WANG Jun-qiang;FAN Hong-bin;WU Tian-jin;LI Meng-wei(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Information and Communication Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学前沿交叉科学研究院,山西太原030051 [3]中北大学信息与通信工程学院,山西太原030051

出　　处：《仪表技术与传感器》2023年第1期12-16,共5页Instrument Technique and Sensor

基　　金：“173”项目(2017JCJQZD00604)。

摘　　要：为了满足在恶劣环境下爆炸冲击波压力的测量需求,提出了一种结构为上层“膜+凸柱”与下层“十字梁”的高频响MEMS石墨烯压力传感器。使用ANSYS workbench软件对该结构进行分析,结果表明,其频响为1.34 MHz,在满量程60 MPa情况下,十字梁根部位置处石墨烯的应变最高可达0.259%。最后,使用方块电阻计算方法对石墨烯电阻值进行预估。为高频响石墨烯压力传感器的设计提供了一定的可行性的结构方案。In order to meet the measurement requirements of explosion shock wave pressure in harsh environments,a high-frequency response MEMS graphene pressure sensor with the structure of the upper layer“membrane-column”and the lower layer“cross beam”was proposed.By using ANSYS workbench software to analyze the structure,the results show that its frequency response is 1.34 MHz,and the strain of graphene at the root of the cross beam can reach up to 0.259%in the full scale 60 MPa.Finally,the graphene resistance value was estimated using the sheet resistance calculation method.It can provide a certain feasible structural scheme for the design of high-frequency response graphene pressure sensors.

关 键 词：高频响 石墨烯 压阻效应 MEMS 压力传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]