热阴极电离真空计相对灵敏度数值计算与实验研究  

Experimental and Numerical Study on Relative Sensitivity of Hot Cathode Ionization Vacuum Gauge

作　　者：葛金国 张虎忠[1] 姚鹏 马卓娅 魏建平 成永军[1] GE Jinguo;ZHANG Huzhong;YAO Peng;MA Zhuoya;WEI Jianping;CHENG Yongjun(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空科学与技术学报》2022年第12期908-913,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(62171208)。

摘　　要：电离真空计广泛应用于超高真空测量,是目前唯一实际可行的超高真空测量仪器。针对不同气体环境,真空规管的电离截面不同且对测量灵敏度产生显著影响,本文基于BEB电子碰撞电离截面模型和数值仿真算法,精确计算了真空规管电离区域内不同气体的电离截面,并实测了真空规管灵敏度变化特征。结果表明,在10^(-8)-10^(-5) Pa压力范围内,Kr、Ar、CH_(4)、CO_(2)、He气体在真空规管中的相对灵敏度分布偏差最大仅为4.78%,不同气体的实测相对灵敏度分别为2.01、1.46、1.66、1.45、0.198。数值计算结果与实验结果具有良好一致性。Ionization vacuum gauges are widely used in ultra-high vacuum measurement and are currently the only practical ultra-high vacuum measurement instruments. For different gas environments, the ionization cross section of the vacuum gauge is different and has a significant impact on the measurement sensitivity. Based on the BEB electron impact cross section model and numerical simulation algorithm, the ionization cross section of different gases in the ionization region of the vacuum gauge was calculated, and the variety of relative sensitivity of vacuum gauge was measured. The results show that in the pressure range of 10^(-8)-10^(-5) Pa, the relative sensitivity distribution deviation of Kr, Ar, CH_(4), CO_(2), He gas in the vacuum gauge is only 4.78%, and the measured relative sensitivities of different gases are 2.01,1.46, 1.66, 1.45, 0.198. The simulation results are in good agreement with the experimental results.

关 键 词：电离真空计 相对灵敏度 碰撞电离截面 多种气体 

分 类 号：TH812[机械工程—仪器科学与技术]