电子束物理气相沉积叶片热障涂层工艺稳定性提升技术研究  

Investigation on Improvement of Process Stability of Thermal Barrier Coatings on Blades Prepared by Electron Beam Physical Vapour Deposition

作　　者：滕晓丹 彭徽[2,3] 李刘合 郭洪波[2,3,5] 宫声凯[1,2,3] TENG Xiaodan;PENG Hui;LI Liuhe;GUO Hongbo;GONG Shengkai(Research Institute of Aero-Engine,Beihang University,Beijing 100191,China;Research Institute for Frontier Science,Beihang University,Beijing 100191,China;Key Laboratory of High-Temperature Structural Materials&Coatings Technology(Ministry of Industry and Information Technology),Beijing 100191,China;School of Mechanical Engineering and Automation,Beihang University,Beijing 100191,China;School of Materials Science and Engineering,Beihang University,Beijing 100191,China)

机构地区：[1]北京航空航天大学航空发动机研究院,北京100191 [2]北京航空航天大学前沿科学技术创新研究院,北京100191 [3]高温结构材料与涂层技术工信部重点实验室,北京100191 [4]北京航空航天大学机械工程及自动化学院,北京100191 [5]北京航空航天大学材料科学与工程学院,北京100191

出　　处：《航空制造技术》2023年第1期40-45,52,共7页Aeronautical Manufacturing Technology

基　　金：国家科技重大专项(2017-Ⅶ-0007-0100);国家自然科学基金(52071006)。

摘　　要：电子束物理气相沉积(EB-PVD)是航空发动机涡轮叶片涂层的先进制备技术。EB-PVD的工艺稳定性对于叶片涂层质量及批产一致性至关重要。本研究针对我国先进航空发动机对高性能热障涂层的应用需求,研制出了EB-PVD自动蒸发沉积技术和叶片多自由度涂层沉积技术。工艺验证和性能测试结果表明,所研制的自动蒸发沉积技术可使涂层过程靶材消耗均匀稳定,涂层质量良好;双坩埚结构配置可进一步满足新一代超高温双层结构热障涂层工艺需求。所研制的多自由度沉积技术有助于提升叶片涂层厚度均匀性,改善缘板涂层质量,实现涂层厚度和微观组织的精确调控。利用上述工艺制备的涂层试片抗燃气热冲击性能优异,模拟叶片缘板位置涂层寿命与模拟叶身位置涂层寿命相近。Electron beam physical vapor deposition(EB-PVD)is widely used in fabricating thermal barrier coatings(TBCs)onto aero-engine turbine blades.The process stability of EB-PVD determines the quality of TBCs and batch-tobatch consistency.In this work,two technologies including automatic evaporation of ceramic targets and multi-degreeof-freedom motion of blades were developed,in order to improve the EB-PVD coating performance.The results show that the ceramic targets can be automatically evaporated,yielding an even and smooth top surface.Coatings are obtained with a well-developed columnar structure.Two-layer coating system for ultra-high temperature applications can be further realized by the two-crucible configuration,which allows the deposition of two different targets within one coating process.The multi-degree-of-freedom motion enables the blades to rotate and tilt simultaneously,benefiting the tailoring of microstructure and thickness distribution of parts with complex geometries.Burner rig tests conducted for coating properties validation demonstrate that coatings deposited at the top surface of the platform exhibit excellent thermal cycling life compared with that at the outer surface of the blades.

关 键 词：电子束物理气相沉积 热障涂层 工艺稳定性 微观组织 厚度均匀性 燃气热冲击 

分 类 号：TG174.4[金属学及工艺—金属表面处理]