飞秒激光与材料相互作用中的超快动力学  

Ultrafast Dynamics of Femtosecond Laser Interaction with Materials

作　　者：姜玺阳 王飞飞[2,3] 周伟 于连栋 Jiang Xiyang;Wang Feifei;Zhou Wei;Yu Liandong(School of Management,XiamenUniversity,Xiamen 361005,Fujian,China;College of Control Science and Engineering,China University of Petroleum,Qingdao 266000,Shandong,China;School of Mechanical Engineering,Beijing Institute of Technolog,Beijing 100081,China;School of Aerospace Engineering,Xiamen University,Xiamen 361005,Fujian,China)

机构地区：[1]厦门大学管理学院,福建厦门361005 [2]中国石油大学(华东)控制科学与工程学院,山东青岛266000 [3]北京理工大学机械与车辆学院,北京100081 [4]厦门大学航空航天学院,福建厦门361005

出　　处：《中国激光》2022年第22期1-21,共21页Chinese Journal of Lasers

基　　金：基础加强计划重点基础研究项目(2019-JCJQ-ZD-298-01);国家自然科学基金(52005147)。

摘　　要：飞秒激光以其超快超强特性可以实现三维复杂结构的微纳级别精密制造。超快光场与材料相互作用过程中存在大量新现象、新效应和新机制,亟待揭示。本文简要介绍飞秒激光与材料相互作用的基本过程以及飞秒激光泵浦探测技术的发展历程。首先重点阐述了高斯型飞秒激光与材料相互作用超快动力学的研究进展,根据不同的时间尺度分别对相互作用过程中的光子与电子相互作用、电子与晶格相互作用过程、相变,以及等离子体/冲击波喷发等过程的观测与机制分析进行总结;随后针对基于电子动态调控新方法的飞秒激光加工超快动力学进行综述,分析对比了其与传统飞秒激光和材料相互作用超快动力学的差异;最后针对该领域的发展方向进行了展望。Significance Miniaturization of electronic and information devices has become the development trend in the age of science and technology. Owing to its benefits, including simple integration without contact, flexible and controllable fabrication, and low material loss, femtosecond laser micro/nano manufacturing has gradually become a crucial research direction in micro/nano manufacturing technology. The femtosecond laser can achieve ultra-precision, high-efficiency, and high-quality micro/nano fabrication of almost all materials. The interaction between femtosecond laser and materials is distinct from that of the traditional laser-material interaction process, owing to its ultra-short pulse characteristics, which is a nonlinear and unbalanced multi-temporal-scale ultrafast process. It involves various physical processes, like photon absorption and electron excitation, phase transition, plasma/shockwave radiation and eruption, material removal, and other ultrafast dynamics processes. These physical processes fundamentally influence the final structure of laser processed materials and can directly regulate the structure’s morphology and properties. Thus, to attain the constrained breakthrough and extensive application in femtosecond laser micro/nano fabrication, it is important to understand and regulate the ultrafast dynamic evolution of femtosecond laser interaction with materials. An in-depth study and understanding of the ultra-fast dynamic evolution mechanism in femtosecond laser processing will offer a theoretical fundamental and guidance for the realization of high-efficiency, high-precision, and high-quality femtosecond laser micro/nano fabrication. Therefore, facilitating the quick development of femtosecond laser micro/nano fabrication technology and its application.Process Femtosecond laser pump-probe technology is employed to investigate the ultrafast dynamics evolution in femtosecond laser processing. With the development of the time delay translation stage and optical imaging technology, temporal and

关 键 词：激光技术 飞秒激光 微纳加工 超快动力学 泵浦探测 激光与材料相互作用 

分 类 号：TN249[电子电信—物理电子学]